AXCELIS TECHNOLOGIES INC — Director's Dealing 2012

Mar 16, 2012

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2012-03-15

Reporting Person: BREWER KEVIN J (EVP, Operations)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2012-03-15	Common Stock	A	120000	—	Acquired	210047	Direct

Footnotes

F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2000 Stock Plan. 100% of these restricted stock units will vest on either March 15, 2013 or March 15, 2014 or will forfeit on March 15, 2013, based on the Company's achievement of performance goals under the 2012 Axcelis Management Incentive Plan.

F2: Of the shares held as of March 15, 2012, 120,000 were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture.