AXCELIS TECHNOLOGIES INC — Director's Dealing 2012

Mar 16, 2012

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2012-03-15

Reporting Person: FALLON LYNNETTE C (Executive VP, HR/Legal)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2012-03-15	Common Stock	A	116363	—	Acquired	229729	Direct

Footnotes

F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2000 Stock Plan. These restricted stock units will vest as to 100% of the shares on either March 15, 2013 or March 15, 2014 or will forfeit on March 15, 2013, depending on the Company's achievement of performance targets under the 2012 Axcelis Management Incentive Plan.

F2: Of the shares held as of March 15, 2012, 116,363 were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture.