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AXCELIS TECHNOLOGIES INC Director's Dealing 2012

May 23, 2012

31374_dirs_2012-05-23_a93aac33-9e6a-4a93-a008-40f1d8f9e720.zip

Director's Dealing

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SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2012-05-23

Reporting Person: PUMA MARY G (Director, Chairman, President and CEO)

Non-Derivative Transactions

Date Security Code Shares Price A/D Holdings After Ownership
2012-05-23 Common Stock P 20000 $0.99 Acquired 300452 Direct

Holdings (Non-Derivative)

Security Shares Ownership
Common Stock 20000 Indirect