AXCELIS TECHNOLOGIES INC — Director's Dealing 2012

May 25, 2012

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2012-05-24

Reporting Person: FALLON LYNNETTE C (Executive VP, HR/Legal)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2012-05-24	Common Stock	P	2300	$1.03	Acquired	232029	Direct
2012-05-24	Common Stock	P	2700	$1.04	Acquired	234729	Direct

Footnotes

F1: The purchases reported on this Form 4 are matchable under Section 16(b) of the Securities Exchange Act of 1934 with a sale transaction by Ms. Fallon in February 2012. Ms. Fallon has paid the Company the full amount of the profit realized in connection with the short-swing transactions.

F2: Of the shares held as of May 24, 2012, 116,363 shares were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture.