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AXCELIS TECHNOLOGIES INC Director's Dealing 2012

May 29, 2012

31374_dirs_2012-05-29_ae3d003a-8197-49d2-9379-20160f7c6352.zip

Director's Dealing

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SEC Form 4/A — Form 4/A

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2012-05-24

Reporting Person: THOMPSON H BRIAN (Director)

Non-Derivative Transactions

Date Security Code Shares Price A/D Holdings After Ownership
2012-05-24 Common Stock P 20000 $1.00 Acquired 20000 Indirect

Holdings (Non-Derivative)

Security Shares Ownership
Common Stock 84185 Direct