AXCELIS TECHNOLOGIES INC — Director's Dealing 2012

Jul 17, 2012

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2012-07-16

Reporting Person: BREWER KEVIN J (EVP, Global Operations)

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2012-07-16	Stock option (right to buy)	$0.93	A	150000	Acquired	2019-07-16	Common Stock (150000)	Direct

Footnotes

F1: Granted pursuant to the Axcelis Technologies, Inc. 2012 Equity Incentive Plan.

F2: To become exercisable as to 25% of the shares granted on each of 7/16/2013, 7/16/2014, 7/16/2015 and 7/16/2016.