AXCELIS TECHNOLOGIES INC — Director's Dealing 2011

Jan 18, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2011-01-18

Reporting Person: ZAGER JAY (CFO and EVP)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-01-18	Common Stock	A	50000	—	Acquired	50000	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2011-01-18	Stock option (right to buy)	$3.59	A	200000	Acquired	2021-01-18	Common Stock (200000)	Direct

Footnotes

F1: Granted Pursuant to the Axcelis Technologies, Inc. 2000 Stock Plan.

F2: These shares are issuable on vesting of restricted stock units granted under the Company's 2000 Stock Plan. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements. These restricted stock units will vest as to 25% of the granted units on each of 1/18/2012, 1/18/2013, 1/18/2014 and 1/18/2015.

F3: Of the shares held as of January 18, 2011, 50,000 were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements.

F4: Granted Pursuant to the Axcelis Technologies, Inc. 2000 Stock Plan.

F5: To become exercisable as to 25% of the shares on each of 1/18/2012, 1/18/2013, 1/18/2014 and 1/18/2015.