AXCELIS TECHNOLOGIES INC — Director's Dealing 2011

Jul 18, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2011-07-15

Reporting Person: ZAGER JAY (CFO and EVP)

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2011-07-15	Stock option (right to buy)	$1.60	A	150000	Acquired	2021-07-15	Common Stock (150000)	Direct

Footnotes

F1: Granted pursuant to the Axcelis Technologies, Inc. 2000 Stock Plan.

F2: To become exercisable as to 25% of the shares on each of 7/15/2012, 7/15/2013, 7/15/2014 and 7/15/2015.