AXCELIS TECHNOLOGIES INC — Director's Dealing 2011

Jul 19, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2011-07-15

Reporting Person: Bintz William J (EVP, Prod. Dev., Eng. & Mktg)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-07-16	Common Stock	F	793	$1.60	Disposed	45109	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2011-07-15	Stock option (right to buy)	$1.60	A	150000	Acquired	2021-07-15	Common Stock (150000)	Direct

Footnotes

F1: Shares withheld by the Company equal to tax liability of the executive officer incident to the vesting of restricted stock units issued in accordance with Rule 16b-3.

F2: Represents the closing price of the common stock on July 18, 2011 (the first trading day after the vesting date).

F3: Of the shares held as of July 16, 2011, 11,955 were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements.

F4: Granted pursuant to the Axcelis Technologies, Inc. 2000 Stock Plan.

F5: To become exercisable as to 25% of the shares on each of 7/15/2012, 7/15/2013, 7/15/2014 and 7/15/2015.