AXCELIS TECHNOLOGIES INC — Director's Dealing 2011

Sep 20, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2011-09-17

Reporting Person: Bintz William J (EVP, Prod. Dev., Eng. & Mktg)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-09-17	Common Stock	F	3795	$1.36	Disposed	41314	Direct

Footnotes

F1: Shares withheld by the Company equal to tax liability of the executive officer incident to the vesting of restricted stock units issued in accordance with Rule 16b-3.

F2: Represents the closing price of the common stock on September 19, 2011 (the first trading day after the vesting date).