AXCELIS TECHNOLOGIES INC — Director's Dealing 2010

Jul 16, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2010-07-15

Reporting Person: PUMA MARY G (Director, Chairman, President and CEO)

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2010-07-15	Stock option (right to buy)	$1.60	A	250000	Acquired	2020-07-15	Common Stock (250000)	Direct

Footnotes

F1: Granted Pursuant to the Axcelis Technologies, Inc. 2000 Stock Plan.

F2: Exercisable as to 25% of the total shares on each of 7/15/2011, 7/15/2012, 7/15/2013 and 7/15/2014.