AXCELIS TECHNOLOGIES INC — Director's Dealing 2010

Jul 6, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2010-07-01

Reporting Person: PUMA MARY G (Director, Chairman, President and CEO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-07-01	Common Stock	F	8521	$1.59	Disposed	292201	Direct
2010-07-03	Common Stock	F	13228	$1.42	Disposed	278973	Direct

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	20000	Indirect

Footnotes

F1: Shares withheld by the Company equal to tax liability of the executive officer incident to the vesting of restricted stock units issued in accordance with Rule 16b-3.

F2: Represents the closing price of the common stock at July 1, 2010.

F3: Shares withheld by the Company equal to tax liability of the executive officer incident to the vesting of restricted stock units issued in accordance with Rule 16b-3.

F4: Represents the closing price of the common stock at July 6, 2010 (the first trading day after the vesting date).

F5: Of the shares held as of July 3, 2010, 26,840 were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements.