AXCELIS TECHNOLOGIES INC — Director's Dealing 2010

Feb 17, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2010-02-16

Reporting Person: BREWER KEVIN J (EVP, Operations)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-02-16	Common Stock	A	27142	—	Acquired	136841	Direct

Footnotes

F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2000 Stock Plan. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding reuqirements. These restricted stock units will vest in full on November 12, 2010.

F2: Of the shares held as of February 16, 2010, 74,817 were issuable on vesting of restricted stock units granted under the 2000 Stock Plan and are subject to forfeiture. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements.