AXCELIS TECHNOLOGIES INC — Director's Dealing 2010

May 19, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2010-05-17

Reporting Person: PUMA MARY G (Director, Chairman, President and CEO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-05-17	Common Stock	W	1665	—	Acquired	299057	Direct
2010-05-18	Common Stock	W	1665	—	Acquired	300722	Direct

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	20000	Indirect

Footnotes

F1: Ms. Puma acquired these shares under a will and/or by the laws of descent and distribution.

F2: Of the shares held as of May 18, 2010, 95,347 were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements.