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AXCELIS TECHNOLOGIES INC Director's Dealing 2010

Sep 20, 2010

31374_dirs_2010-09-20_4c9e4231-cd86-4b42-829c-d57eb97f9b60.zip

Director's Dealing

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SEC Form 4/A — Form 4/A

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2010-07-01

Reporting Person: FLYNN MATTHEW P (EVP, Customer Operations)

Non-Derivative Transactions

Date Security Code Shares Price A/D Holdings After Ownership
2010-07-01 Common Stock F 5368 $1.59 Disposed 154314 Direct
2010-07-03 Common Stock F 7275 $1.42 Disposed 147039 Direct

Footnotes

F1: Shares withheld by the Company equal to tax liability of the executive officer incident to the vesting of restricted stock units issued in accordance with Rule 16b-3.

F2: Represents the closing price of the common stock at July 1, 2010.

F3: Shares withheld by the Company equal to tax liability of the executive officer incident to the vesting of restricted stock units issued in accordance with Rule 16b-3.

F4: Represents the closing price of the common stock at July 6, 2010 (the first trading day after the vesting date).

F5: Of the shares held as of July 3, 2010, 55,978 were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements.