AXCELIS TECHNOLOGIES INC — Director's Dealing 2010

Nov 9, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2010-11-08

Reporting Person: FLYNN MATTHEW P (EVP, Customer Operations)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-11-08	Common Stock	S	11769	$2.61	Disposed	135270	Direct
2010-11-08	Common Stock	S	3000	$2.62	Disposed	132270	Direct
2010-11-08	Common Stock	S	231	$2.63	Disposed	132039	Direct

Footnotes

F1: Of the shares held as of November 8, 2010, 55,978 were issuable on vesting of restricted stock units granted under the 2000 Stock Plan and are subject to forfeiture. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements.