AXCELIS TECHNOLOGIES INC — Director's Dealing 2010

Nov 24, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2010-11-22

Reporting Person: BREWER KEVIN J (EVP, Operations)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-11-22	Common Stock	S	1100	$2.68	Disposed	116250	Direct

Footnotes

F1: Of the shares held as of November 22, 2010, 13,421 were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements.