AXCELIS TECHNOLOGIES INC — Director's Dealing 2010

Dec 17, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2010-12-16

Reporting Person: Bintz William J (Senior VP, Marketing)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-12-16	Common Stock	S	5165	$3.38	Disposed	50737	Direct
2010-12-16	Common Stock	S	4835	$3.37	Disposed	45902	Direct

Footnotes

F1: Of the shares held as of December 16, 2010, 14,455 were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements.