AMTECH SYSTEMS INC — Director's Dealing 2011

Feb 18, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (asys)
CIK: 0000720500
Period of Report: 2011-02-16

Reporting Person: GARNREITER MICHAEL (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-02-16	Amtech Systems, Inc. $.01 par value common stock	M	1148	$7.3	Acquired	1148	Direct
2011-02-16	Amtech Systems, Inc. $.01 par value common stock	S	1148	$25	Disposed	0	Direct
2011-02-18	Amtech Systems, Inc. $.01 par value common stock	M	852	$7.3	Acquired	852	Direct
2011-02-18	Amtech Systems, Inc. $.01 par value common stock	M	2000	$7.3	Acquired	2852	Direct
2011-02-18	Amtech Systems, Inc. $.01 par value common stock	S	852	$25.05	Disposed	2000	Direct
2011-02-18	Amtech Systems, Inc. $.01 par value common stock	S	2000	$25.0325	Disposed	0	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2011-02-16	Amtech Systems, Inc. Non-Employee Director Stock Option	$7.3	M	1148	Acquired	2017-02-19	Amtech Systems, Inc. $.01 par value common stock (1148)	Direct
2011-02-18	Amtech Systems, Inc. Non-Employee Director Stock Option	$7.3	M	852	Acquired	2017-02-19	Amtech Systems, Inc. $.01 par value common stock (852)	Direct
2011-02-18	Amtech Systems, Inc. Non-Employee Director Stock Option	$7.3	M	2000	Acquired	2017-02-19	Amtech Systems, Inc. $.01 par value common stock (2000)	Direct

Footnotes

F1: Price omitted because the transaction is a grant of a stock option.

F2: This is the number of derivative securities, with the same terms and conditions, following the reported transaction.

F3: This is the number of derivative securities, with the same terms and conditions, following the reported transaction. Total of all derivative securities, with different terms and conditions, held following the reported transaction is 21,000.