AMTECH SYSTEMS INC — Director's Dealing 2011

Feb 28, 2011

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (asys)
CIK: 0000720500
Period of Report: 2011-02-28

Reporting Person: WHANG JONG S (Director, Chief Executive Officer)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2011-02-28	Amtech Systems, Inc. $.01 par value common stock	P	2100	$23.009	Acquired	77933	Direct
2011-02-28	Amtech Systems, Inc. $.01 par value common stock	P	100	$22.78	Acquired	78033	Direct
2011-02-28	Amtech Systems, Inc. $.01 par value common stock	P	1700	$22.81	Acquired	79733	Direct
2011-02-28	Amtech Systems, Inc. $.01 par value common stock	P	100	$22.79	Acquired	79833	Direct
2011-02-28	Amtech Systems, Inc. $.01 par value common stock	P	200	$22.8	Acquired	80033	Direct