AMTECH SYSTEMS INC — Director's Dealing 2010

Sep 9, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (asys)
CIK: 0000720500
Period of Report: 2010-09-07

Reporting Person: WHANG JONG S (Chief Executive Officer)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-09-07	Amtech Systems, Inc. $.01 par value common stock	M	29400	$6.5315	Acquired	119400	Direct
2010-09-07	Amtech Systems, Inc. $.01 par value common stock	S	29400	$16.2725	Disposed	90000	Direct
2010-09-08	Amtech Systems, Inc. $.01 par value common stock	M	24100	$6.5315	Acquired	114100	Direct
2010-09-08	Amtech Systems, Inc. $.01 par value common stock	S	24100	$16.0559	Disposed	90000	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	M	42800	$6.5315	Acquired	132800	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	300	$15.81	Disposed	132500	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	1400	$15.83	Disposed	131100	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	750	$15.76	Disposed	130350	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	1000	$15.91	Disposed	129350	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	1300	$15.94	Disposed	128050	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	800	$15.92	Disposed	127250	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	4100	$15.93	Disposed	123150	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	398	$16.01	Disposed	122752	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	200	$16.1	Disposed	122552	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	300	$16.09	Disposed	122252	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	200	$16.08	Disposed	122052	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	1200	$16	Disposed	120852	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	500	$16.02	Disposed	120352	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	1350	$15.89	Disposed	119002	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	3049	$15.9	Disposed	115953	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	1050	$15.96	Disposed	114903	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	500	$15.99	Disposed	114403	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	4351	$15.95	Disposed	110052	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	100	$15.98	Disposed	109952	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	1202	$15.97	Disposed	108750	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	1100	$16.03	Disposed	107650	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	900	$16.06	Disposed	106750	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	300	$16.05	Disposed	106450	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	1100	$16.04	Disposed	105350	Direct
2010-09-09	Amtech Systems, Inc. $.01 par value common stock	S	200	$15.88	Disposed	105150	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2010-09-07	Amtech Systems, Inc. Employee Stock Option	$6.5315	M	29400	Acquired	2011-03-15	Amtech Systems, Inc. $.01 par value common stock (29400)	Direct
2010-09-08	Amtech Systems, Inc. Employee Stock Option	$6.5315	M	24100	Acquired	2011-03-15	Amtech Systems, Inc. $.01 par value common stock (24100)	Direct
2010-09-09	Amtech Systems, Inc. Employee Stock Option	$6.5315	M	42800	Acquired	2011-03-15	Amtech Systems, Inc. $.01 par value common stock (42800)	Direct

Footnotes

F1: Price omitted because the transaction is a grant of a stock option.

F2: This is the number of derivative securities, with the same terms and conditions, following the reported transaction.

F3: This is the number of derivative securities, with the same terms and conditions, following the reported transaction. Total of all derivative securities, with different terms and conditions, held following the reported transaction is 188,700.