AMTECH SYSTEMS INC — Director's Dealing 2010

Nov 15, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (asys)
CIK: 0000720500
Period of Report: 2010-11-12

Reporting Person: Pentinga Fokko (President)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-11-12	Restricted Stock	A	11667	—	Acquired	28750	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2010-11-12	Common Stock	$17.12	A	23333	Acquired	2020-11-12	Common Stock (23333)	Direct

Footnotes

F1: Price omitted because transaction is a grant of restricted stock.

F2: Price omitted because the transaction is a grant of a stock option.

F3: The restricted stock and stock options vest in 4 equal installments beginning on November 12, 2011.