AMTECH SYSTEMS INC — Director's Dealing 2010

Nov 19, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (asys)
CIK: 0000720500
Period of Report: 2010-11-17

Reporting Person: WHANG JONG S (Director, Chief Executive Officer)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-11-17	Amtech Systems, Inc. $.01 par value common stock	M	5700	$6.5315	Acquired	109033	Direct
2010-11-17	Amtech Systems, Inc. $.01 par value common stock	S	300	$18	Disposed	108733	Direct
2010-11-17	Amtech Systems, Inc. $.01 par value common stock	S	200	$18.01	Disposed	108533	Direct
2010-11-17	Amtech Systems, Inc. $.01 par value common stock	S	300	$18.02	Disposed	108233	Direct
2010-11-17	Amtech Systems, Inc. $.01 par value common stock	S	1400	$18.2	Disposed	106833	Direct
2010-11-17	Amtech Systems, Inc. $.01 par value common stock	S	2100	$18.25	Disposed	104733	Direct
2010-11-17	Amtech Systems, Inc. $.01 par value common stock	S	100	$18.34	Disposed	104633	Direct
2010-11-17	Amtech Systems, Inc. $.01 par value common stock	S	1300	$18.45	Disposed	103333	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	M	23958	$6.5315	Acquired	127291	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	10058	$17.5	Disposed	117233	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	2389	$17.51	Disposed	114844	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	1300	$17.52	Disposed	113544	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	1611	$17.53	Disposed	111933	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	2700	$17.54	Disposed	109233	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	3600	$17.55	Disposed	105633	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	900	$17.56	Disposed	104733	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	200	$17.58	Disposed	104533	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	100	$17.59	Disposed	104433	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	100	$17.61	Disposed	104333	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	100	$17.63	Disposed	104233	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	100	$17.64	Disposed	104133	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	500	$17.65	Disposed	103633	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	200	$17.66	Disposed	103433	Direct
2010-11-19	Amtech Systems, Inc. $.01 par value common stock	S	100	$17.67	Disposed	103333	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2010-11-17	Amtech Systems, Inc. Employee Stock Option	$6.5315	M	5700	Acquired	2011-03-15	Amtech Systems, Inc. $.01 par value common stock (5700)	Direct
2010-11-19	Amtech Systems, Inc. Employee Stock Option	$6.5315	M	23958	Acquired	2011-03-15	Amtech Systems, Inc. $.01 par value common stock (23958)	Direct

Footnotes

F1: Price omitted because the transaction is a grant of a stock option.

F2: This is the number of derivative securities, with the same terms and conditions, following the reported transaction.

F3: This is the number of derivative securities, with the same terms and conditions, following the reported transaction. Total of all derivative securities, with different terms and conditions, held following the reported transaction is 185,709.