AMTECH SYSTEMS INC — Director's Dealing 2010

Dec 2, 2010

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (asys)
CIK: 0000720500
Period of Report: 2010-11-30

Reporting Person: WHANG JONG S (Director, Chief Executive Officer)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	M	9042	$6.5315	Acquired	112375	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	500	$21	Disposed	111875	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	13	$20.76	Disposed	111862	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	187	$20.73	Disposed	111675	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	5	$20.31	Disposed	111670	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	100	$20.41	Disposed	111570	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	20	$20.33	Disposed	111550	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	310	$20.35	Disposed	111240	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	700	$20.34	Disposed	110540	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	300	$20.37	Disposed	110240	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	312	$20.42	Disposed	109928	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	1120	$20.32	Disposed	108808	Direct
2010-11-20	Amtech Systems, Inc. $.01 par value common stock	S	680	$20.3	Disposed	108128	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	500	$20.29	Disposed	107628	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	600	$20.2	Disposed	107028	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	200	$20.1	Disposed	106828	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	300	$20.14	Disposed	106528	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	500	$20.22	Disposed	106028	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	280	$20.26	Disposed	105748	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	100	$20.28	Disposed	105648	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	600	$20.21	Disposed	105048	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	200	$20.15	Disposed	104848	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	300	$20.17	Disposed	104548	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	400	$20.19	Disposed	104148	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	300	$20.16	Disposed	103848	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	515	$20.18	Disposed	103333	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	903	$20.21	Disposed	102430	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	976	$20.2	Disposed	101454	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	77	$20.25	Disposed	101377	Direct
2010-11-30	Amtech Systems, Inc. $.01 par value common stock	S	1800	$20.16	Disposed	99577	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2010-11-30	Amtech Systems, Inc. Employee Stock Option	$6.5315	M	9042	Acquired	2011-03-15	Amtech Systems, Inc. $.01 par value common stock (9042)	Direct

Footnotes

F1: Price omitted because the transaction is a grant of a stock option.

F2: This is the number of derivative securities, with the same terms and conditions, following the reported transaction. Total of all derivative securities, with different terms and conditions, held following the reported transaction is 176,667.