AMTECH SYSTEMS INC — Director's Dealing 2008

Mar 20, 2008

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2008-03-14

Reporting Person: KING ROBERT F (Director)

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2008-03-14	Option to purchase $.01 par value common stock	$11.05	A	5000	Acquired	2018-03-14	$.01 par value common stock (5000)	Direct

Footnotes

F1: Amtech Systems, Inc. Non-Employee Director Stock Option

F2: One-third of the stock option granted vest on each of the first three aniversaries of the grant date.

F3: Amtech Systems, Inc. $.01 par value common stock.

F4: Price omitted because the transaction is a grant of a stock option.

F5: Any unexercised stock options expire 90 days after membership on the Board of Directors terminates, except that the expiration is one year from the date of termination if such termination is the result of death, or such other expiration date as the Board of Directors sets in its discretion at the time of termination.