AMTECH SYSTEMS INC — Director's Dealing 2008

May 28, 2008

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2008-05-27

Reporting Person: KING ROBERT F (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2008-05-27	Common Stock $.01 Par Value	M	5000	$5.65	Acquired	11000	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2008-05-27	Stock option to purchase $.01 par value common stock	$5.65	M	5000	Acquired	2014-03-19	Amtech Systems, Inc, $.01 par value common stock (5000)	Direct

Footnotes

F1: Amtech Systems, Inc. Non-Employee Director Stock Option.

F2: Exercise of stock option.