AMTECH SYSTEMS INC — Director's Dealing 2007

Feb 12, 2007

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2006-12-22

Reporting Person: SCOTT RICHARD L (10% Owner)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2006-12-22	Common Stock	P	3389	$7.0991	Acquired	487443	Indirect
2007-01-11	Common Stock	P	2000	$6.9705	Acquired	489443	Indirect
2007-01-12	Common Stock	P	4600	$6.973	Acquired	494043	Indirect
2007-01-16	Common Stock	P	399	$6.99	Acquired	494442	Indirect
2007-01-17	Common Stock	P	4000	$6.8711	Acquired	498442	Indirect
2007-01-18	Common Stock	P	3000	$6.7813	Acquired	501442	Indirect
2007-01-19	Common Stock	P	13558	$6.80	Acquired	515000	Indirect