AMTECH SYSTEMS INC — Director's Dealing 2007

Feb 21, 2007

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2007-02-19

Reporting Person: GARNREITER MICHAEL (Director)

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2007-02-19	Option to purchase $.01 par value Common Stock	$7.30	A	6000	Acquired	2017-02-19	$.01 Par Value Common Stock (6000)	Direct

Footnotes

F1: One-third of the stock options granted vest and become excercisable on each of the first three anniversaries of the grant date.

F2: Price omitted because the transaction is an option grant.