AMTECH SYSTEMS INC — Director's Dealing 2007

Oct 25, 2007

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2007-10-19

Reporting Person: KING ROBERT F (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2007-10-19	Amtech Systems, Inc. $.01 Par Value Common Stock	M	6000	$3.25	Acquired	6000	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2007-10-19	Option to purchase $.01 par value common stock	$3.25	M	6000	Disposed	2013-05-23	Amtech Systems, Inc. $.01 par value common stock (6000)	Direct

Footnotes

F1: Amtech Systems, Inc. Non-Employee Director Stock Option

F2: Exercise of a stock option.