AMTECH SYSTEMS INC — Director's Dealing 2007

Nov 2, 2007

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2007-11-01

Reporting Person: WHANG JONG S (Director, President and CEO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2007-11-01	Amtech Systems, Inc. $.01 par value common stock	M	15000	$6.5315	Acquired	15000	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2007-11-01	Option to purchase $.01 par value common stock	$6.5315	M	15000	Disposed	2011-03-15	Amtech Systems, Inc. $.01 par value common stock (15000)	Direct

Footnotes

F1: Incentive stock option granted pursuant to the Amtech Systems, Inc. 1998 Employee Stock Option Plan.

F2: These options were part of an option to purchase 150,000 shares, granted on March 15, 2001, of which 20% vested per year on each of the first five anniversaries of the grant date.

F3: This is an exercise of a stock option.