AMTECH SYSTEMS INC — Director's Dealing 2006

Jan 30, 2006

SEC Form 3/A — Form 3/A

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2005-07-08

Reporting Person: Averick Robert M (Director)

Holdings (Derivative)

Security	Exercise Price	Expiration	Underlying	Shares	Ownership
Series A Convertible Preferred Stock	$		Common Stock, par value $.01 per share (10000)		Indirect

Footnotes

F1: None

F2: The reporting person owns a 3.2% interest in Amtech Investments, LLC, which owns 312,500 shares of Series A Convertible
Preferred Stock that is convertible into 312,500 shares of common stock, par value $.01 per share, of Amtech Systems, Inc.