AMTECH SYSTEMS INC — Director's Dealing 2006

Jan 30, 2006

SEC Form 4/A — Form 4/A

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2005-07-08

Reporting Person: Averick Robert M (Director)

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2005-07-18	Stock Option (right to buy)	$4.695	A	6000	Acquired		Common Stock, par value $.01 per share (6000)	Direct

Footnotes

F1: One-third of the stock options granted vest and become exercisable on each of the first three anniversaries of the grant
date.

F2: The options expire on July 8, 2015. Any unexercised options expire 90 days after membership on the Board of Directors
terminates, except that the expiration is one year from the date of termination if such termination is the result of death,
or the Board of Directors in it discretion sets another expiration date at the time of termination.

F3: Price omitted because the transaction is an option grant.