AMTECH SYSTEMS INC — Director's Dealing 2006

Feb 15, 2006

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2006-02-13

Reporting Person: WHANG JONG S (Director, President and Chief Executive)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2006-02-13	$.01 par value common stock	M	41517	$1.126	Acquired	125972	Direct
2006-02-13	$.01 par value common stock	M	2500	$1.5	Acquired	128472	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2006-02-13	Option to purchase $.01 par value common stock	$1.126	M	41517	Disposed	2007-02-28	Option to purchase $.01 par value common stock (41517)	Direct
2006-02-13	Option to purchase $.01 par value common stock	$1.5	M	2500	Disposed	2009-02-26	Option to purchase $.01 par value common stock (2500)	Direct