AMTECH SYSTEMS INC — Director's Dealing 2006

Feb 21, 2006

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2006-02-16

Reporting Person: WHANG JONG S (Director, President and CEO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2006-02-16	$.01 Par Value Common Stock	S	5000	$9.25	Disposed	123472	Direct
2006-02-16	$.01 Par Value Common Stock	S	4750	$8.50	Disposed	118722	Direct
2006-02-16	$.01 Par Value Common Stock	S	4602	$8.90	Disposed	114120	Direct
2006-02-16	$.01 Par Value Common Stock	S	4000	$9.20	Disposed	110120	Direct
2006-02-16	$.01 Par Value Common Stock	S	2750	$9.19	Disposed	107370	Direct
2006-02-16	$.01 Par Value Common Stock	S	2400	$9.21	Disposed	104970	Direct
2006-02-16	$.01 Par Value Common Stock	S	2100	$8.75	Disposed	102870	Direct
2006-02-16	$.01 Par Value Common Stock	S	1650	$8.95	Disposed	101220	Direct
2006-02-16	$.01 Par Value Common Stock	S	1550	$8.85	Disposed	99670	Direct
2006-02-16	$.01 Par Value Common Stock	S	1200	$8.46	Disposed	98470	Direct
2006-02-16	$.01 Par Value Common Stock	S	1100	$8.91	Disposed	97370	Direct
2006-02-16	$.01 Par Value Common Stock	S	1000	$9.10	Disposed	96370	Direct
2006-02-16	$.01 Par Value Common Stock	S	1000	$9.05	Disposed	95370	Direct
2006-02-16	$.01 Par Value Common Stock	S	950	$9.00	Disposed	94420	Direct
2006-02-16	$.01 Par Value Common Stock	S	900	$8.73	Disposed	93520	Direct
2006-02-16	$.01 Par Value Common Stock	S	869	$8.70	Disposed	92651	Direct
2006-02-16	$.01 Par Value Common Stock	S	800	$8.92	Disposed	91851	Direct
2006-02-16	$.01 Par Value Common Stock	S	650	$9.29	Disposed	91201	Direct
2006-02-16	$.01 Par Value Common Stock	S	602	$9.14	Disposed	90599	Direct
2006-02-16	$.01 Par Value Common Stock	S	600	$9.23	Disposed	89999	Direct
2006-02-16	$.01 Par Value Common Stock	S	500	$9.01	Disposed	89499	Direct
2006-02-16	$.01 Par Value Common Stock	S	500	$8.96	Disposed	88999	Direct
2006-02-16	$.01 Par Value Common Stock	S	500	$8.62	Disposed	88499	Direct
2006-02-16	$.01 Par Value Common Stock	S	500	$8.60	Disposed	87999	Direct
2006-02-16	$.01 Par Value Common Stock	S	500	$8.55	Disposed	87499	Direct
2006-02-16	$.01 Par Value Common Stock	S	500	$8.51	Disposed	86999	Direct
2006-02-16	$.01 Par Value Common Stock	S	399	$8.93	Disposed	86600	Direct
2006-02-16	$.01 Par Value Common Stock	S	300	$8.88	Disposed	86300	Direct
2006-02-16	$.01 Par Value Common Stock	S	300	$8.81	Disposed	86000	Direct
2006-02-16	$.01 Par Value Common Stock	S	300	$8.37	Disposed	85700	Direct