AMTECH SYSTEMS INC - Director's Dealing 2006

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2006-02-16

Reporting Person: WHANG JONG S (Director, President and CEO)

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2006-02-16	$.01 Par Value Common Stock	S	200	$8.79	Disposed	85500	Direct
2006-02-16	$.01 Par Value Common Stock	S	150	$8.86	Disposed	85350	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$9.09	Disposed	85250	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$9.07	Disposed	85150	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$9.06	Disposed	85050	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$9.02	Disposed	84950	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$8.43	Disposed	84850	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$8.39	Disposed	84750	Direct
2006-02-16	$.01 Par Value Common Stock	S	99	$8.94	Disposed	84651	Direct
2006-02-16	$.01 Par Value Common Stock	S	98	$9.03	Disposed	84553	Direct
2006-02-16	$.01 Par Value Common Stock	S	98	$8.80	Disposed	84455	Direct
2006-02-16	$.01 Par Value Common Stock	S	200	$8.79	Disposed	85500	Direct
2006-02-16	$.01 Par Value Common Stock	S	150	$8.86	Disposed	85350	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$9.09	Disposed	85250	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$9.07	Disposed	85150	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$9.06	Disposed	85050	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$9.02	Disposed	84950	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$8.43	Disposed	84850	Direct
2006-02-16	$.01 Par Value Common Stock	S	100	$8.39	Disposed	84750	Direct
2006-02-16	$.01 Par Value Common Stock	S	99	$8.94	Disposed	84651	Direct
2006-02-16	$.01 Par Value Common Stock	S	98	$9.03	Disposed	84553	Direct
2006-02-16	$.01 Par Value Common Stock	S	98	$8.80	Disposed	84455	Direct