AMTECH SYSTEMS INC — Director's Dealing 2006

Feb 22, 2006

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2006-02-17

Reporting Person: HASS ROBERT T (Director, Vice President-Finance)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2006-02-17	$.01 par value common stock	M	6250	$1.126	Acquired	6375	Direct
2006-02-17	$.01 par value common stock	M	3000	$4.5	Acquired	9375	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2006-02-17	stock option to purchase $.01 par value common stock	$1.126	M	6250	Disposed	2008-10-01	$.01 par value common stock (6250)	Direct
2006-02-17	Stock option to purchase $.01 par value common stock	$1.126	M	3000	Disposed	2012-07-12	$.01 par value common stock (3000)	Direct

Footnotes

F1: 1,000 of these options became exercisable on July 12th of 2003, 2004 and 2005