AMTECH SYSTEMS INC — Director's Dealing 2006

Mar 3, 2006

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2006-03-02

Reporting Person: KING ROBERT F (Director)

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2006-03-02	Option to purchase $.01 par value common stock	$9.05	A	5000	Acquired	2017-03-02	$.01 par value common stock (5000)	Direct

Footnotes

F1: One-third of the stock option granted vests on each of the first three anniversaries of the grant date.

F2: After membership of the Board of Directors terminates, any unexercised stock options expire 90 days thereafter, except that the expiration is one year from the date of termination if such termination is the result of death, or, in any event of termination, the expiration is such later date, if any, set by the Board of Directors in its discretion.

F3: Price omitted because the transaction is an option grant.