AMTECH SYSTEMS INC — Director's Dealing 2006

Mar 3, 2006

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2006-03-02

Reporting Person: FIRESTONE LAWRENCE (Director)

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2006-03-02	Stock option	$9.05	A	5000	Acquired	2017-03-02	$.01 par value common stock (5000)	Direct

Footnotes

F1: One-third of the stock options granted vest and become exercisable on each of the first three anniversaries of the grant
date.

F2: The options expire on July 8, 2015. Any unexercised options expire 90 days after membership on the Board of Directors terminates, except that the expiration is one year from the date of termination if such termination is the result of death. However, in either event, the Board of Directors in it discretion may set a later expiration date at the time of termination.

F3: Price omitted because the transaction is an option grant.