AMTECH SYSTEMS INC — Director's Dealing 2006

May 3, 2006

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2006-04-24

Reporting Person: Anderson Bradley Clark (Chief Financial Officer)

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2006-04-24	Stock Option	$8.51	A	10000	Acquired	2017-04-24	$.01 par value common stock (10000)	Direct

Footnotes

F1: One-fifth of the stock options granted vest and become exercisable on each of the first five anniversaries of the grant date.

F2: Price omitted because the transaction is an option grant.