AMTECH SYSTEMS INC — Director's Dealing 2005

Nov 14, 2005

SEC Form 3 — Initial Statement of Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2005-10-27

Reporting Person: FIRESTONE LAWRENCE (Director)

Holdings (Derivative)

Security	Exercise Price	Expiration	Underlying	Shares	Ownership
Non-Employee Director Stock Option	$5.41	2015-10-27	Amtech Systems, Inc. $.01 par value common stock (6000)		Direct

Footnotes

F1: Option to purchase Amtech Systems, Inc., $.01 par value common stock.

F2: One-third of the stock options granted vest on each of the first three anniversaries of the grant date.

F3: Any unexercised stock options expire 90 days after membership on the Board of Directors terminate, except that the expiration is one year from the date of termination if such termination is the result of death, or the Board of Directors exercises its discretion to the set another period for expiration at the time of termination.