AMTECH SYSTEMS INC — Director's Dealing 2004

May 5, 2004

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AMTECH SYSTEMS INC (ASYS)
CIK: 0000720500
Period of Report: 2004-03-29

Reporting Person: KATZ ALVIN L (Director)

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2004-03-29	Stock option	$5.65	A	5000	Acquired	2014-03-29	Amtech Systems, Inc. $.01 par value common stock (5000)	Direct

Footnotes

F1: Option to purchase Amtech Systems, Inc., $.01 par value common stock.

F2: One-third of the stock options granted vest on each of the first three anniversaries of the grant date.

F3: Any unexercised stock options expire 90 days after membership on the Board of Directors terminates, except that the expiration is one year from the date of termination if such termination is the result of death.