SÜSS MicroTec SE

Interim / Quarterly Report • Aug 7, 2025

Half-yearly financial report January 1 – June 30 2025

Growing Innovation

Key figures

SUSS Group

for the period from January 1, 2025, to June 30, 2025

in € m i l l ion	Q 2 2 0 2 5	Q 2 2 0 2 4	C han g e	H 1 2 0 2 5	H 1 2 0 2 4	C han g e	in € m i l l ion	Q 2 2 0 2 5	Q 2 2 0 2 4	C han g e	H 1 2 0 2 5	H 1 2 0 2 4	C han g e
Bu ine dev lop t s ss e me n							Ba lan hee d c h f low t a ce s n as
Or der inta ke	7 8. 7	9 3. 9	-1 6. 2 %	1 6 6. 8	1 9 2. 2	-1 3. 2 %	Eq ity u	-	-	-	2 9 7. 5	2 4 9. 4	1 9. 3 % +
Or der boo k a f Jun 3 0 s o e	-	-	-	3 2 5. 8	4 5 0. 0	-2 7. 6 %	Eq ity io rat u	-	-	-	5 5. 8 %	5 6. 0 %	-0. 2 % ints p o
Sa les	1 4 3. 2	9 9. 3	4 4. 2 % +	2 6 6. 4	1 9 2. 8	3 8. 2 % +	Ba lan hee l t to ta ce s	-	-	-	5 3 2. 9	4 4 5. 0	1 9. 8 % +
Gro f it ss p ro	5 2. 3	4 0. 2	3 0. 1 % +	9 9. 0	7 6. 8	2 8. 9 % +	Ne h t ca s	-	-	-	4 3. 3	1 2 2. 9	-6 4. 8 %
Gro f it m in ss p ro arg	3 6. 5 %	4 0. 5 %	-4. 0 % ints p o	3 7. 2 %	3 9. 8 %	-2. 6 % ints p o	Fre h f low e c as	-3 6. 4	2 6. 5	-	-2 7. 5	2 2. 3	-
Co f sa les st o	9 1. 0	5 9. 0	5 4. 2 % +	1 6 7. 5	1 1 6. 0	4 4. 4 % +	Fre h f low l * tot e c as a	-3 6. 5	2 2. 6	-	-2 7. 6	9 2. 7	-
Res h a d dev lop nt ear c n e me exp ens es	1 2. 5	9. 4	3 3. 0 % +	2 3. 4	1 8. 6	2 5. 8 % +	Fur t her key f ig ure s
E B I T D A	2 3. 6	1 1 7.	3 8. 0 % +	9 4 5.	3 3. 8	3 8 % 5. +	Ca ita l ex d itur p p en e	9. 5	1. 8	2 8 % 4 7. +	1 1. 2	3. 0	2 3. 3 % 7 +
E B I T D A m in arg	1 6. 5 %	1 7. 2 %	-0. 7 % ints p o	1 7. 2 %	1 5. 5 %	1. 7 % ints + p o	Ca ita l ex d itur io t p p en e ra	6. 6 %	1. 8 %	4. 8 % ints + p o	4. 2 %	1. 6 %	2. 6 % ints + p o
E B I T	2 1. 5	1 5. 2	4 1. 4 % +	4 1. 9	3 0. 1	3 9. 2 % +	De iat ion p rec	2. 1	2. 0	5. 0 % +	4. 0	3. 8	5. 3 % +
E B I T m in arg	1 5. 0 %	1 5. 3 %	-0. 3 % ints p o	1 5. 7 %	1 5. 6 %	0. 1 % ints + p o	Em loy f Jun 3 0 p ees as o e	-	-	-	1, 5 3 2	1, 3 1 0	1 6. 9 % +
Ear ing f co inu ing ion nt t n s o op era s ( fter ) tax a es	1 5. 7	1 2. 1	2 9. 8 % +	3 0. 6	2 2. 5	3 6. 0 % +	* Fro ont inu ing d d isc ont inu m c an e	d o t ion p era s
Ne f it * t p ro	1 2. 3	1 2. 1	-	2 7. 2	8 0. 8	-
Ear ing har bas ic ( in € ) * n s p er s e.	0. 6 4	0. 6 4	0. 0 % ±	1. 4 2	4. 2 3	-

Content

I i t t t n e r m m a n a g e m e n r e p o r	4
Gr Fu da l in for ion bo he ta t t t n me n ma a u ou p	4
Re ic p i ion t o t p or n e co no m os	4
Ne f ina ia l p i ion d r l f o ion t a ts, t ts t ss e nc os an es u o p era s	5
Re l f o ion ts t su o p era s	5
F ina ia l p i ion d n t t a ts nc os an e ss e	9
Re i ies d r is ks t o tun t p or n o p p or an	1 1
Fo Re t t rec as p or	1 1
H l f- l f i i l t t t a e a n a n c a s a e m e n s y r y	1 4
Co l i da d s f inc ( I F R S ) te ta tem t o nso en om e	1 4
S f c he ive inc ( I F R S ) ta tem t o en om p re ns om e	1 5
Co S l i da d ba lan he ( I F R ) te t nso ce s e	6 1
Co S l i da te d s ta tem t o f s ha ho l de ' eq i ty ( I F R ) nso en re rs u	1 8
Co l i da d s f c h f low ( I F R S ) te ta tem t o nso en as	1 9
S l d l t t t e e c e e x p a n a o r y n o e s	2 1
R i b i l i t t t t e s p o n s y s a e m e n	2 7
C F i i l l d / t t / I i t n a n c a c a e n a r o n a c m p r n

"In the second quarter, we once again demonstrated our operational ability to execute a large number of customer projects in parallel. The result is an outstanding sales growth of 38.2% in the first half of 2025 compared to the previous year. Unlike in past years, we have already achieved more than half of our full-year sales target within just six months. At the same time, we have observed that the overall order situation did not improve between April and June, but we expect better momentum in the remaining months of the current financial year.

We are not satisfied with the development of our gross profit margin, which stood at only 37.2% after the first half of the year, primarily due to one-time effects. This has led us to revise our full year margin guidance. In the second half of the year, a flexible response to changing market conditions will be important. Our goal is to steer SUSS profitably and with high cost efficiency through a phase of extra financial burden during the build-up of our site in Zhubei, while consistently advancing our innovation and structural projects, which will lay the foundation for our expected growth in the coming years."

Interim management report

for the period from January 1, 2025, to June 30, 2025

Fundamental information about the Group

The SUSS Group (hereinafter referred to as 'SUSS') develops, manufactures, distributes, and maintains equipment for the production of microelectronics, microsystems technology, and related applications. SUSS's markets are the front end of the semiconductor industry, which we serve with our Photomask Solutions segment, and the back end of the semiconductor industry, which we address with our Advanced Backend Solutions segment.

The fundamentals of the Group, its business activities, sales markets, and segment structure are described in the combined management report of the Annual Report for the year 2024. The legal structure of the Group consists of SUSS MicroTec SE as the management and financing holding company and its subsidiaries. There were no changes in this regard during the reporting period. The Annual Report for 2024 is published at www.suss.com in the "Investor Relations" section.

Report on economic position

Economic environment

In its July 2025 forecast, the International Monetary Fund (IMF) assumes that the global economy will grow by 3.0% in 2025, measured in terms of global gross domestic product. The growth forecast for the current financial year has thus been reduced by 0.3 percentage points compared to the January forecast. This is due to ongoing international crises and conflicts as well as

increasing (economic) political uncertainty, particularly as a result of changes in international tariffs and export restrictions.

For our most important sales region, Asia (Emerging and Developing Asia), growth in 2025 is expected to be 4.1% (previous year: 4.3%). The most important Asian markets for SUSS are Taiwan, China, and South Korea. In Europe, GDP growth remains below the global average. The economic output of the eurozone is expected to grow by 1.0% (previous year: 0.9%).

In its June forecast for 2025, the RWI – Leibniz Institute for Economic Research predicts GDP growth of 0.4% for the German economy. The effects of US tariff policy and the expected countermeasures continue to be the main factors weighing on economic development.

In addition to general economic development, which can provide an indication of global demand for semiconductors, the development of the global semiconductor market and the markets for semiconductor equipment and wafer fab equipment are particularly important for SUSS.

Semiconductor market

Source: WSTS, June 3, 2025

The suffix "e" after a year indicates an expected/estimated value.

The World Semiconductor Trade Statistics Organization (WSTS) expects the global semiconductor market to grow to a total volume of USD 700.9 billion in 2025. Logic and memory applications continue to be the fastest-growing segments, benefiting from high demand in the areas of AI applications, cloud infrastructure, and high-end consumer electronics. Despite the uncertainties described above, the semiconductor market has developed in line with forecasts so far in 2025. In December 2024, WSTS forecast growth of 11.2% for the current year.

Semiconductor equipment and wafer fab equipment market

The positive development on the global semiconductor market is also reflected in the development of the market for semiconductor equipment and the wafer fab equipment submarket, which is important for SUSS.

Source: SEMI, July 22, 2025

The suffix "e" after a year indicates an expected/estimated value.

In its half-year forecast for 2025, the industry association Semiconductor Equipment and Materials International (SEMI) anticipates growth in the market for semiconductor equipment to USD 125.5 billion. Based on the figures for 2024, this corresponds to a projected market growth of 7.4% in 2025. Very significant growth is expected in the two smaller submarkets of assembly and packaging as well as test applications.

The suffix "e" after a year indicates an expected/estimated value.

For the largest and, for SUSS, particularly relevant submarket of wafer fab equipment, SEMI expects significant growth of 6.2% to USD 110.8 billion in 2025. The main driver is the ongoing expansion of manufacturing capacity in the area of logic and memory applications.

Net assets, financial position and results of operations

Results of operations

The first half of 2025 was the strongest first half year in terms of sales in SUSS's history. Compared to 2024, sales increased significantly by 38.2% to €266.4 million (previous year: €192.8 million). We have thus already generated more than half of the sales we have set as our target in the sales forecast for 2025. This very positive development was driven primarily by the execution of the order book for our temporary bonders and the encouraging development of the Photomask Solutions segment.

At €78.7 million, the order intake in the second quarter of 2025 was significantly below the previous year's figure of €93.9 million. After six months of the 2025 financial year, order intake totaled €166.8 million, down €25.4 million or 13.2% from the previous year's figure of €192.2 million. The expected decline in demand from China had a significant impact on the development; after six months, orders from China were down €29.5 million on the previous year. In addition, the development in demand reflects the uncertainty of some customers in context of global customs and trade policy and the associated potential impact on demand for semiconductors. In the current environment, expansion and investment decisions are being postponed in some cases due to the high level of planning uncertainty. In addition, our customers' investments in the AI infrastructure environment are normalizing after the very high capacity expansions of the past two years. In the Advanced Backend Solutions segment, demand for coating solutions developed particularly well in the second quarter of 2025, while demand for imaging and bonding solutions was subdued. After six months, segment order intake amounted to €120.1 million (previous

Source: SEMI, July 22, 2025

year: €130.4 million). In the same period, the Photomask Solutions segment generated order intake of €46.7 million (previous year: €61.8 million). After a good first quarter of 2025 with order intake of €33.7 million, new business declined significantly between April and June with order intake of €12.9 million in the segment. contracted

Due to the accelerated completion of customer projects and the decline in order intake in the first half of the year, the order book contracted. As of June 30, 2025, it amounted to €325.8 million (previous year: €450.0 million). The majority of the order book is still scheduled for production and revenue recognition in 2025. However, orders scheduled for delivery in the coming financial year continue to increase. At the end of June 2025, the order value for our tools, excluding the service and spare parts business, amounted to around €60 million.

We achieved strong sales growth of €73.6 million or 38.2% to €266.4 million in the reporting period (previous year: €192.8 million). We succeeded in executing a significant portion of the high order intake of the past two years by upscaling production capacity. Temporary employees and manufacturing partners also contributed to this achievement. Sales growth in the first half of 2025 was spread across both segments. In the Advanced Backend Solutions segment, sales grew by 25.1% compared to the previous period to €170.1 million (previous year: €136.0 million). All three product lines, namely Imaging, Coating, and Bonding Systems, recorded doubledigit percentage sales growth compared to the previous year. In the Photomask Solutions segment, sales climbed by as much as 69.5% to €96.3 million in the first half of 2025 (previous year: €56.8 million). The second quarter thus contributed a total of €143.2 million to consolidated sales, representing an increase of 44.2% compared to the previous year's figure of €99.3 million.

Gross profit also rose significantly in the reporting period, up 28.9% to €99.0 million (previous year: €76.8 million). However, at 37.2%, the gross profit margin was 2.6 percentage points below the figure for the same period last year (39.8%) and also outside our forecast range of 39 to 41%. In the first half of the year, lower margins in the Advanced Backend Solutions segment were caused by a change in the customer and product mix as well as start-up and training costs in Taiwan, primarily for the production of the UV projection scanner. In addition, inventory write-downs in connection with a discontinued project had an negative impact on gross profit in the single-digit million range, particularly in the second quarter. As a result, the gross profit margin in this segment was only 35.1%, compared to 42.3% in the same period of the previous year. By contrast, the gross profit margin in the Photomask Solutions segment developed excellently and stood at 40.2% (previous year: 34.6%). The Group's gross profit margin in the second quarter of 2025 was 36.5% (previous year: 40.5%).

Sales expenses amounted to €14.5 million in the first half of 2025 (previous year: €12.3 million). We significantly increased our research and development expenses from €18.6 million in the previous year to €23.4 million in the first half of 2025 in order to drive forward important projects for the future of SUSS. This brought the R&D ratio, i.e., the ratio of research and development expenditure to sales, to 8.8% and, due to the even faster growth in sales, below the R&D ratio of 9.6% for the same period last year. Administrative expenses increased to €21.6 million in the first half of 2025 (previous year: €15.0 million), mainly due to higher personnel expenses because of growth-related adjustments to important functions, increased IT expenses due to higher license expenses, and project costs. In total, sales, administrative, and research and development expenses increased by 29.6% to €59.5 million (previous year: €45.9 million), which was below the rate of sales growth.

In the reporting period, the balance of other operating income and other operating expenses was positive and amounted to €2.4 million (previous year: €-0.8 million). The main driver here was a positive exchange rate effect of €2.6 million.

EBIT rose by 39.2% to €41.9 million in the first six months of financial year 2025 (previous year: €30.1 million), mainly due to higher gross profit and a disproportionately low increase in sales, administrative, and R&D expenses. However, EBIT was additionally impacted by higher onboarding and training costs due to ongoing staff expansion in the area of research and development. Nevertheless, the EBIT margin improved by 0.1 percentage points to 15.7% (previous year: 15.6%). This figure was within the forecast range for financial year 2025 of 15 to 17%. The second quarter of 2025 contributed €21.5 million to EBIT in the reporting period, corresponding to an EBIT margin of 15.0%.

At €0.9 million, the financial result for the first half of 2025 was below the previous year's figure of €1.3 million due to lower interest income.

Income from continuing operations after taxes amounted to €30.6 million in the first half of the year (previous year: €22.5 million), an

improvement of €8.1 million or 36.0% in the reporting period. In connection with the sale of the MicroOptics business unit to Focuslight Technologies (HK) Investment Management Co. Ltd., income from discontinued operations after taxes amounted to €-3.4 million in the first half of 2025 (previous year: €58.3 million). Following disagreements over the fulfillment of certain disclosure and information obligations at closing, SUSS agreed in the second quarter of 2025 to a final settlement of the matter with the buyer in the amount of €3.4 million. Overall, net income for the reporting period amounted to €27.2 million, compared to €80.8 million in the same period of the previous year.

Development in the regions

The APAC (Asia and Pacific), North America, and EMEA (Europe, Middle East, and Africa) regions are the most important global regions for SUSS's business. In the first six months of 2025, the APAC region accounted for by far the largest share of order intake at 76.7% (previous year: 75.6%).

Sales in the APAC region rose by 29.2% to €222.6 million in the first six months of the financial year 2025 (previous year: €172.3 million), contributing 83.6% (previous year: 88.8%) to consolidated sales. Taiwan and China account for the largest share of both order intake and sales. In the North America region, sales amounted to €25.9 million in the first half of the year, compared to €7.8 million in the previous year. Sales in EMEA rose from €14.0 million in the previous year to €17.9 million.

Development in the segments

Segment Advanced Backend Solutions

The Advanced Backend Solutions segment combines the development, manufacture, and sale of the Imaging Systems (mask aligners and UV projection scanners), Coating Systems (coaters/developers and systems for inkjet coating processes), and Bonding Systems (temporary and permanent bonders) product lines. Production of these product lines is based in Germany at the Garching near Munich and Sternenfels sites, and in Taiwan at the Hsinchu site. The main target market for this segment is the advanced backend of the semiconductor industry.

Key figures Segment Advanced Backend Solutions

in € m i l l ion	Q 2 2 0 2 5	Q 2 2 0 2 4	2 0 2 H 1 5	2 0 2 H 1 4
Or der inta ke	6 5. 8	6 5. 8	1 2 0. 1	1 3 0. 4
Or der boo k	-	-	2 1 9. 5	2 8 0. 4
Sa les	8 7. 2	7 9. 6	1 7 0. 1	1 3 6. 0
Gro f it ss p ro	2 9. 2	3 2. 4	5 9. 6	5 7. 5
Gro f it m in ss p ro arg	3 3. 5 %	4 0. 7 %	3 5. 1 %	4 2. 3 %
E B I T	8. 3	1 4. 1	1 8. 0	2 1. 3
E B I T m in arg	9. 5 %	1 7. 7 %	1 0. 6 %	1 5. 7 %

In the first six months of 2025, we generated an order intake of €120.1 million in the Advanced Backend Solutions segment (previous year: €130.4 million). Demand for coating solutions, particularly for applications in the advanced packaging sector, increased significantly again in the second quarter of 2025. However, the high order volume for coaters was not able to fully compensate for the decline in order intake for bonders. Although we received follow-up orders for temporary bonders and debonders between April and June 2025 in connection with the further expansion of capacity for the manufacture of AI chip modules, these did not reach the level of the same period of the previous year. Order

intake for imaging solutions increased slightly in the first half of 2025 compared to the previous year.

The order book in the Advanced Backend Solutions segment amounted to €219.5 million as of June 30, 2025, falling below the €280.4 million recorded as of June 30, 2024, due to the accelerated execution of orders and a slight decline in demand at the same time.

Segment sales increased significantly in the first half of 2025 by €34.1 million or 25.1% to €170.1 million (previous year: €136.0 million). Fortunately, all three product lines contributed to the increase in sales with double-digit growth rates. In Bonding Systems, the execution of AI-related orders for temporary bonding solutions continued as planned. In Coating Solutions, we benefited from the improved order situation since the second half of 2024 and achieved the strongest percentage increase in the segment's product line comparison. Sales of imaging systems also increased noticeably, particularly due to the production and delivery of UV projection scanners, which are used in the packaging process of AI chip modules.

The gross profit margin of the Advanced Backend Solutions segment declined to 35.1% in the first six months of 2025 (previous year: 42.3%). The decline is mainly attributable to an unfavorable change in the product and customer mix, start-up costs in Taiwan, particularly for the manufacture of UV projection scanners, and onetime effects from inventory write-downs in connection with a discontinued project.

Segment EBIT amounted to €18.0 million after the first six months (previous year: €21.3 million), mainly due to increased research and development expenses and expenses resulting from growth-

related adjustments to key functions and projects allocated to general administrative expenses. The EBIT margin in the Advanced Backend Solutions segment was 10.6%, compared to 15.7% in the same period of the previous year, mainly due to the only slight increase in gross profit from sales. One focus of our development activities in the Advanced Backend Solutions segment in the first half of 2025 was on developing the new generation of our mask aligner and UV projection scanner. We specifically increased our workforce for this purpose. In the first half of the year, onboarding and training costs led to an additional burden on research and development costs. Our new tool generations will address with technical improvements new application areas of so-called advanced packaging in the growth market of semiconductor structuring for the backend of the semiconductor industry. Our tools are being developed based on the new platform and modularization strategy, which aims to increase commonalities in the systems and thereby reduce manufacturing complexity. The market launch for both solutions is planned for 2026. In the bonding segment, we introduced our die- to-wafer (D2W) hybrid bonder in May, which completes our hybrid bonding portfolio for the time being and can be used for the production of both logic and memory semiconductors.

Segment Photomask Solutions

The Photomask Solutions segment comprises the development, manufacture, and sale of solutions specializing in the cleaning and processing of photomasks, primarily in the front end of semiconductor manufacturing.

Key figures Segment Photomask Solutions

in € m i l l ion	Q 2 2 0 2 5	Q 2 2 0 2 4	2 0 2 H 1 5	1 2 0 2 H 4
Or der inta ke	1 2. 9	2 8. 1	4 6. 7	6 1. 8
Or der boo k	-	-	1 0 6. 3	1 6 9. 6
Sa les	5 6. 0	1 9. 7	9 6. 3	5 6. 8
Gro f it ss p ro	2 2. 5	7. 4	3 8. 7	1 9. 6
Gro f it m in ss p ro arg	0. 2 % 4	3 6 % 7.	0. 2 % 4	3 % 4. 5
E B I T	1 4. 6	2. 8	2 7. 7	1 1. 0
E B I T m in arg	2 6. 1 %	1 4. 2 %	2 8. 8 %	1 9. 4 %

At €46.7 million, the order intake in the Photomask Solutions segment in the first six months of the financial year was below the comparable figure for the previous year of €61.8 million. This decline was mainly due to subdued demand in the second quarter of 2025, which amounted to €12.9 million (previous year: €28.1 million), as orders for new equipment from China continued to fall as expected. The order book of €106.3 million as of June 30, 2025, declined below the previous year's figure of €169.6 million due to accelerated throughput times in recent months. In terms of sales, the Photomask Solutions segment achieved a significant increase of €39.5 million or 69.5% to €96.3 million in the

first half of 2025. The momentum in the manufacture and delivery of equipment increased again in the second quarter of 2025 to €56.0 million, up from €40.3 million in the first quarter of 2025.

The gross profit margin in the Photomask Solutions segment amounted to 40.2% after six months in the current financial year (previous year: 34.5%). The improvement compared to the same period last year is mainly attributable to a favorable product and customer mix as well as higher sales volume. Since sales in this segment consist of a relatively low number of tools with comparatively high sales prices, margin development is subject to greater fluctuations when there are changes in the product and customer mix.

Segment EBIT increased significantly from €11.0 million to €27.7 million in the first half of 2025 due to the significantly higher volume and gross profit. The EBIT margin thus improved from 19.4% to 28.8%.

In the Photomask Solutions segment, our development activities so far this year have focused on the next generation of the high-end MaskTrack SMART platform for cleaning photomasks for the most advanced high-NA EUV lithography. We have also pushed ahead with the development of a new cleaning platform for the mid-end segment for technology nodes from 38 to 90 nanometers. The official market launch of both solutions is planned for 2026. We have also continued to develop a solution for wafer cleaning. Based on our expertise in photomask cleaning and wafer processing in the Advanced Backend Solutions segment, we are developing a particularly sustainable solution for backend processes in the semiconductor industry. In addition to a new equipment platform, we are working on processes that use more environmentally friendly cleaning media. The first system, which is built according to the

requirements of our production customers, is scheduled for completion in the second half of 2025.

Segment Central Group Functions

The Central Group Functions segment reports the expenses and income of the central Group functions that cannot be allocated at segment level. The segment posted EBIT of €-7.3 million in the first half of 2025 (previous year: €56.7 million). Segment EBIT includes a one-time expense of €3.4 million for discontinued operations resulting from the agreement with the buyer of the MicroOptics business unit described above. In the previous year, segment EBIT included the extraordinary income from the sale of the MicroOptics business unit.

Financial position and net assets

Net financial assets and available liquidity

The Group's net liquidity, which is calculated as the balance of cash and cash equivalents and financial liabilities, decreased by €79.6 million compared to December 31, 2024. The main factors contributing to this decline were the €43.2 million increase in financial liabilities from leasing obligations, which are mainly attributable to the lease agreement for the building at the new production site in Zhubei, Taiwan, as well as the free cash flow of €- 27.5 million in the first half of the year.

Analysis of the cash flow statement

Cash flow from operating activities amounted to €-16.3 million in the first half of the current financial year and related exclusively to continuing operations. This was significantly below the corresponding figure for the previous year of €25.3 million. The change in contractual liabilities of €-28.2 million (previous year: €5.4 million) due to lower customer down payments had a noticeable negative impact. Furthermore, the build-up of contractual assets had a negative impact on cash flow from operating activities of €-20.6 million (previous year: €5.0 million). This was offset by the reduction in inventories of €5.2 million (previous year: €-29.5 million). Overall, these developments in the first half of 2025 led to an increase in working capital of €45.3 million compared to the level as of December 31, 2024, to €202.0 million (December 31, 2024: €156.7 million).

Cash flow from investing activities from continuing operations amounted to €-11.2 million in the first six months of 2025 (previous year: €-2.9 million). The increase was mainly due to payments for investments in property, plant, and equipment amounting to €10.9 million (previous year: €2.7 million). Of this amount, €6.1 million was attributable to tenant improvements, in particular technical fittings, for the new location in Taiwan. In addition, €3.2 million was invested in technical equipment and operating and office equipment at our locations in Garching and Sternenfels, Germany. Payments for investments in intangible assets amounted to €0.3 million (previous year: €0.3 million).

Free cash flow from continuing operations, defined as the difference between cash flow from operating activities and cash flow from investing activities, amounted to €-27.5 million in the first half of

2025, which was €49.8 million below the free cash flow of €22.3 million in the first half of 2024. Total free cash flow, i.e. from continuing and discontinued operations, amounted to €-27.6 million in the first half of 2025 (previous year: €92.7 million).

As in the previous year, cash flow from financing activities related exclusively to continuing operations and amounted to €-8.7 million (previous year: €-5.7 million). The increase compared to the same period last year was mainly due to higher repayments lease liabilities of €-2.3 million (previous year: €-1.3 million) and higher dividend payments of €-5.7 million (previous year: €-3.8 million).

As of June 30, 2025, cash and cash equivalents amounted to €99.2 million (December 31, 2024: €136.2 million). This includes €0.5 million that are currently unavailable due to payments to sanctioned business partners in accordance with the US sanctions list. In addition to cash and cash equivalents of €99.2 million (December 31, 2024: €136.2 million), the Group has a syndicated credit facility of €56 million (previous year: €56 million) that can be used for guarantees and cash transactions. As in the previous year, no cash loans were utilized as of June 30, 2025. Guarantees amounting to €8.1 million (previous year: €9.9 million) were utilized, the latter mainly for advance payment guarantees for customer advance payments.

Analysis of the statement of financial position

The SUSS Group's total assets rose to €532.9 million as of June 30, 2025 (December 31, 2024: €500.9 million). This corresponds to an increase of €32.0 million or 6.4%.

This was mainly due to the recognition of the right-of-use asset in the amount of €42.8 million and the associated lease liability in the amount of €42.6 million from the lease agreement for the production site in Zhubei, Taiwan. As a result, property, plant, and equipment increased from €33.8 million to €86.1 million, and financial liabilities from lease obligations increased correspondingly from €8.0 million to €51.1 million. In addition, contractual assets increased by €20.4 million to €79.3 million compared to December 31, 2024. Cash and cash equivalents developed in the opposite direction, falling from €136.2 million to €99.2 million. The Group's equity ratio at the end of the first half of 2025 was 55.8% (December 31, 2024: 56.0%).

Assets

Long-term assets increased significantly to €110.4 million as of June 30, 2025, compared with €58.6 million as of December 31, 2024. This is mainly due to the increase in property, plant, and equipment by €52.3 million to €86.1 million. This increase is mainly attributable to the recognition of the right-of-use asset from the lease

agreement for the production site in Zhubei, Taiwan. Current assets amounted to €422.5 million as of June 30, 2025, a decrease of €19.8 million compared to December 31, 2024. The decrease is mainly attributable to the €37.1 million decline in cash and cash equivalents to €99.2 million (December 31, 2024: €136.2 million). In addition, inventories decreased by €7.0 million to €207.0 million (December 31, 2024: €214.0 million).

Trade receivables and contractual assets increased compared to December 31, 2024. Trade receivables rose by €2.5 million to €17.4 million. Contractual assets amounted to €79.3 million at the end of the first half of 2025 (previous year: €58.9 million) and relate to SUSS's claims for consideration for services already rendered but not yet fully invoiced or paid for as of June 30, 2025, from equipment deliveries.

Liabilities and shareholders' equity

Long-term debt rose from €38.6 million as of December 31, 2024, to €83.3 million as of June 30, 2025. The increase is mainly attributable to higher financial liabilities from leasing obligations, which rose by €39.4 million to €45.1 million in the first half of 2025. The decisive factor here was the recognition of the lease agreement for the production site in Zhubei, Taiwan, in the balance sheet. In addition, deferred tax liabilities increased by €7.1 million to €28.0 million. The change in deferred tax liabilities compared to December 31, 2024, is attributable to increased temporary differences between the valuations under IFRS and the tax values of the German companies as a result of earlier profit recognition under IFRS.

Current liabilities decreased by €30.4 million to €152.1 million in the first half of 2025. This was mainly due to the decline in contractual liabilities – consisting mainly of customer prepayments – by €28.3 million to €71.1 million.

The SUSS Group's equity amounted to €297.5 million on June 30, 2025, an increase of €17.8 million since December 31, 2024.

Further details on the development of consolidated equity are presented in the consolidated statement of changes in equity.

Report on risks and opportunities

The analysis and assessment of the Group's opportunities and risks is the subject of ongoing consideration by the Management Board and the operational management team. Based on opportunityoriented yet risk-conscious management, we strive to achieve a balance between risk avoidance, risk reduction, and controlled risk acceptance. Awareness of risks should not impair our ability to recognize opportunities and use them in the interests of our shareholders to promote the positive development of the company. For a complete description of our approach to identifying, assessing, and managing the risks and opportunities of the SUSS Group, please refer to the comments in our combined management report for 2024.

Compared to the risks described in the risk report of the combined management report for 2024, our assessment of customs and currency risks has changed.

We regularly review the assessment of global customs risks together with external consultants, primarily due to the changing announcements by the United States government.

Exchange rate fluctuations increased in the first half of the year. This was mainly due to the increasing volatility of the USD/EUR exchange rate and fluctuations in the exchange rates of Asian currencies, in particular the Taiwan dollar (TWD), the renminbi (CNY), and the Japanese yen (JPY). SUSS continuously monitors exchange rate developments and reviews the use of additional hedging instruments. Overall, the probability of significant effects from exchange rate risks was assessed as "medium" and the amount of damage as "negligible." The risk was therefore assessed as "medium."

For further details on general economic and geopolitical risks as well as industry- and market-specific risks, please refer to the risk report in the combined management report in the 2024 annual report.

The opportunities arising from market developments and corporate strategy, operational opportunities, and employee-specific opportunities, as described in the opportunities report in the management report in the 2024 Annual Report, remain unchanged.

Employees

As of June 30, 2025, the SUSS Group employed 1,532 people (previous year: 1,310 employees). The 16.9% increase in the number of employees is attributable to the company's growth and targeted expansion in key business areas.

Employees of SUSS Group

	0 6 3 0 2 0 2 / / 5	0 6 3 0 2 0 2 / / 4
A dva d Bac ken d So lut ion s nce	1, 2 0 8	1, 0 3 0
P hot k So lut ion om as s	2 6 7	2 3 7
Ce l Gro Fun ion ntra ct up s	5 7	4 3
Tot l a	1, 5 3 2	1, 3 1 0

Post-balance sheet date events

No events of particular significance occurred for the SUSS Group after the end of the reporting period.

Forecast report

Based on operational developments in the second quarter and expected developments for the remainder of the financial year, we adjusted our forecast for SUSS in an ad hoc announcement on July 28, 2025.

Framework conditions for the forecast

SUSS's business environment is primarily influenced by developments in the semiconductor industry and its capital expenditure cycles, as well as by cyclical global demand for semiconductors. The development of the semiconductor equipment market and the development of the semiconductor market may diverge from one another. On the one hand, growth in the semiconductor equipment industry may decouple from the development of general demand for semiconductors due to efficiency gains, increases in equipment throughput, and process improvements with corresponding yield increases. On the other hand, demand for semiconductor equipment is rising due to the expansion of regional semiconductor and chip production capacities, particularly in the US and Europe. In the semiconductor industry itself, new technologies are continuously being developed and additional fields of application are being opened up, ensuring dynamic but cyclical growth.

As described in the economic report, growth is expected for all semiconductor equipment markets in which we are active over the course of the year. However, developments in individual country markets may vary.

For the global semiconductor industry, megatrends such as the miniaturization of semiconductor structure sizes, artificial

intelligence, electromobility, and autonomous driving remain intact. In addition, a positive impetus is expected from government-funded investments in new, regional semiconductor manufacturing facilities.

On the other hand, uncertain macroeconomic conditions are having a negative impact, affecting our customers' investment security. These include, for example, volatile tariffs and trade restrictions as well as exchange rate fluctuations.

Premises of the forecast

The updated forecast for SUSS considers all information known to the Management Board at the time of preparing this half-year financial report which, in its opinion, could have an impact on SUSS's business development. The forecast is based, among other things, on the expectations described above regarding the development of the global semiconductor equipment industry and the ordering and purchasing behavior of our customers, as well as the expected operational development.

Unpredictable events could have an impact on the Group's business development. Such events include, for example, the effects of short-term changes in national and international commercial law, strong exchange rate fluctuations, geopolitical conflicts, or a change in the availability of key components and modules used in our products.

Overall statement on the expected development of SUSS

In the second quarter of 2025, the development already observed in the first quarter continued. We have successfully processed and completed many customer projects. Sales of €123.2 million in the first quarter of 2025 was followed by an even more dynamic second quarter with €143.2 million in sales. Compared to the previous year, sales growth in the current financial year has been 38.2% to date. However, the gross margin of 37.2% achieved in the first half of the year is significantly below the forecast range of 39 to 41% defined in March 2025 for the full year 2025 due to one-time effects. In particular, start-up costs for the production of the UV projection scanner in Taiwan and value adjustments to inventories of discontinued projects had a negative impact on the gross profit margin. At 15.7%, the EBIT margin reached the lower half of the target range of 15 to 17% valid until the forecast update on July 28, 2025. This was due to research and development expenses, which had an extraordinary impact on consolidated EBIT.

The slowdown in our customers' willingness to invest, which was anticipated by numerous experts and also by us, became increasingly apparent in the second quarter of 2025. At €78.7 million, order intake in the second quarter of 2025 was below the first quarter level of €88.1 million. We assume that our customers will place orders for new projects as late as possible due to the uncertain investment environment in terms of customs and trade policy and in view of the recent capacity expansions. We do not expect any major changes in the general economic environment for the rest of the year. Nevertheless, we anticipate a slight upturn in order intake during the second half of the year.

Although the order book as of June 30, 2025, fell to €325.8 million (previous year: €450.0 million), it still provides good visibility for the second half of 2025. We have not been affected by any significant project postponements or order cancellations to date.

Our forecast indicates that the very positive sales trend will not continue in the second half of the year. Rather, we expect that capacities will not be fully utilized, albeit only to a limited extent, and that sales in the second half of the year will be below the level of the first half. We anticipate a product mix with lower profitability in the second half of the year compared to the first half. In addition, as expected, the temporary extra burden of setting up the Zhubei site is weighing on profitability.

Risks remain elevated after the second quarter due to the continuing uncertainty surrounding the global economy and, consequently, global demand for semiconductors. In particular, uncertainty about the customs and trade policy of the United States of America continues to cause low planning security for our customers, despite the recent negotiations between the European Union and the United States, which may also affect SUSS as a result.

Forecast 2025

Per form in d icat anc e or	For t 2 0 2 5 eca s	Res lt 2 0 2 4 u
Sa les	€ 4 7 0 – 5 1 0 m i l l ion	€ 4 4 6. 1 m i l l ion
Gro f it m in ss p ro arg	3 3 9 % 7 –	0. 0 % 4
E B I T m in arg	1 3 – 1 5 %	1 6. 8 %

For our adjusted outlook, this means that, based on our current assessment, we continue to expect to achieve our sales target for 2025 in a range of €470 million to €510 million. We expect the gross profit margin to be in a range of 37 to 39% (previously: 39 to 41%) and the EBIT margin to be in a range of 13 to 15% (previously: 15 to 17%).

In order to achieve our forecast targets, we are working on improving our cost efficiency. At the same time, we are using the flexibility we have built into our production capacities to adapt our structures, including our personnel, to the volume of business. To lay the foundation for our future growth, we are continuing with our research and development projects and our strategic structural projects.

Forward-looking statements

This half-yearly financial report contains information and forecasts relating to future developments of the SUSS Group and its companies. The forecasts represent estimates that we have made based on all the information available to us at the present time. If the assumptions underlying the forecasts do not materialize or if unforeseen events occur that affect earnings, the actual results may differ from those currently expected. We assume no obligation and do not intend to update the forward-looking statements or to correct them if developments other than those expected occur.

Half-yearly financial statements

Consolidated statement of income (IFRS)

for the period from January 1 to June 30, 2025

€ in t hou d san	0 4 / 0 1 / 2 0 2 5 -0 6 3 0 2 0 2 / / 5	0 4 / 0 1 / 2 0 2 4 -0 6 3 0 2 0 2 / / 4	0 1 / 0 1 / 2 0 2 5 -0 6 3 0 2 0 2 / / 5	0 1 / 0 1 / 2 0 2 4 -0 6 3 0 2 0 2 / / 4
Sa les	1 4 3, 2 4 2	9 9, 2 7 3	2 6 6, 4 3 5	1 9 2, 7 7 6
Co st o f sa les	-9 0, 9 9 1	9, 0 3 1 -5	-1 6 0 7, 4 5	-1 1 9 5, 5 7
Gro f i t ss p ro	5 2, 2 5 1	4 0, 2 4 2	9 8, 9 8 5	7 6, 8 1 9
Se l l ing sts co	-8, 0 6 1	-6, 8 0 9	-1 4, 5 4 5	-1 2, 3 3 4
Res h a d dev lop nt c ost ear c n e me s	-1 2, 4 7 3	-9, 3 9 5	-2 3, 3 6 1	-1 8, 5 8 6
A dm in istr ion at sts co	-1 1, 9 4 3	-7, 9 7 4	-2 1, 5 8 9	-1 4, 9 7 3
Ot her ing inc t op era om e	3, 5 9 0	1, 0 9 7	5, 6 5 6	2, 1 4 5
Ot her ing t op era ex p ens es	-1, 8 4 4	-1, 9 4 2	-3, 2 5 0	-2, 9 9 1
Ne inc fro ion ( E B I T ) t t om e m o p era s	2 1, 5 2 0	1 5, 2 1 9	4 1, 8 9 6	3 0, 0 8 0
F ina ia l inc nc om e	2 4 4	0 2 1, 7	0 1, 7 7	0 9 1, 5
F ina ia l ex nc p ens es	-1 0 0	-1 0 6	-1 9 1	-2 0 6
F ina ia l re l t nc su	3 4 2	9 2 1	8 8 6	1, 3 0 3
Pro f i be for ( inu ing ion ) t tax t t e es con op era s	2 1, 8 6 2	1 6, 1 4 0	4 3, 7 8 2	3 1, 3 8 3
Inc e ta om xes	-6, 8 1 1	0 0 -4, 7	2, -1 1 4 1	-8, 8 6 2
Pro f i inu ing ion t co t t n op era s ( f ter tax ) a es	1 5, 6 8 1	1 2, 1 3 3	3 0, 6 4 1	2 2, 5 2 1
Pro f i d isc inu d o ion t t t on e p era s ( f ter tax ) a es	-3, 0 4 7	-8	-3, 0 4 7	8, 3 8 5 1

in € hou d t san	0 4 / 0 1 / 2 0 2 5 -0 6 / 3 0 / 2 0 2 5	0 4 / 0 1 / 2 0 2 4 -0 6 / 3 0 / 2 0 2 4	0 1 / 0 1 / 2 0 2 5 -0 6 / 3 0 / 2 0 2 5	0 1 / 0 1 / 2 0 2 4 -0 6 / 3 0 / 2 0 2 4
Ne f i t p t ro	1 2, 2 7 4	1 2, 1 2 5	2 7, 2 3 4	8 0, 8 3 9
T her f s har ho l der f S U S S M icro Tec S E eo e s o	1 2, 2 7 4	1 2, 1 2 5	2 7, 2 3 4	8 0, 8 3 9
T her f no ont l l ing inte ts eo n-c ro res	0	0	0	0
Ear ing har t inu ing t ion n s p er s e c on op era s ( bas ic ) in €	0. 8 2	0. 6 3	1. 6 0	1. 1 8
Ear ing har inu ing ion t t n s p er s e c on op era s € ( d i lu te d ) in	0. 8 2	0. 6 3	1. 6 0	1. 1 8

Statement of comprehensive income (IFRS)

for the period from January 1, 2025, to June 30, 2025

in € t hou d san	0 1 / 0 1 / 2 0 2 5 0 6 / 3 0 / 2 0 2 5 -	0 1 / 0 1 / 2 0 2 4 0 6 / 3 0 / 2 0 2 4 -
Ne f i t p t ro	2 7, 2 3 4	8 0, 8 3 9
I tem t ha t a t re las i f ie d to f i t a d los in fu tur io ds s re n o c s p ro n s e p er
Act ia l g ins / los from de f ine d ben f it p ion lan uar a ses e ens p s ( fro m t he d isp l o f los from t he le o f su bs i d iar ies ) osa ses sa	5	1, 6 6 0
Tax f fec ( from he d isp l o f los from he le o f su bs i d iar ies ) ts t t e osa ses sa	0	-2 0 6
O t her inc f ter tax for i tem t ha t a t re las i f ie d a om e a s re no c s s inc an exp ens e o r om e	5	1, 4 5 4
Item hat las i f ie d in late io ds s t are rec s r p er
For ig d j ust nt e n c urre ncy a me
ins d los is ing in t he io d t p g a an ses ar cur ren er	-3, 7 4 4	2 4 9
les fers he inc s tr to t tate nt ans om e s me	0	-4, 5 1 8
For ig d j l ust nt t ota a e n c urre ncy me	-3, 7 4 4	-4, 2 6 9
O her inc f for i ha las i f ie d a t ter tax tem t t a om e a s re rec s s a n e xp ens e o r inc in fu tur io ds om e e p er	-3, 7 4 4	2 6 9 -4,
O t her hen ive inc ( f ter tax ) co mp re s om e a	-3, 7 3 9	-2, 8 1 5
To l o her hen ive inc ta t co mp re s om e	2 3, 4 9 5	7 8, 0 2 4
her f s har ho l der f S U S S t eo e s o	2 3, 4 9 5	7 8, 0 2 4
t her f no ont l l ing inte ts eo n-c ro res	0	0

Consolidated balance sheet (IFRS)

as of June 30, 2025

As ts se
in € t hou d san	0 6 / 3 0 / 2 0 2 5	1 2 / 3 1 / 2 0 2 4
No t as ts n-c urr en se
Inta i b le a ts ng sse	0 9 6 4,	6 6 4, 1
Go dw i l l o	1 8, 3 7 7	1 8, 6 3 1
Tan i b le a ts g sse	8 6, 1 1 4	3 3, 8 1 5
Ot her set as s	1, 1 0 9	8 4 5
De fer d ta ts re x a sse	6 2 7	6 9 7
No t as ts n-c urr en se	1 1 0, 3 6 8	5 8, 6 0 4
Cu t As ts rre n se
Inv ies ent or	2 0 7, 0 0 4	2 1 3, 9 7 1
Tra de iva b les rec e	3 1 7, 7 1	8 6 1 4, 1
Co ntra ct a ts sse	7 9, 2 6 8	5 8, 8 9 0
Ot her f ina ia l as set nc s	4 4 4	1, 2 0 4
Cu nt t ets rre ax ass	9	6 7
Ca h a d c h e iva len ts s n as q u	9 9, 1 0 5	1 3 6, 2 3 9
Ot her set as s	1 9, 2 6 1	1 7, 0 3 7
Cu t as ts rre n se	4 2 2, 5 0 7	4 4 2, 2 6 9
To ta l as ts se	3 2, 8 5 7 5	0 0, 8 3 5 7

Consolidated balance sheet (IFRS)

as of June 30, 2025

Liabilities&shareholders' equity

in € t hou d san	0 6 / 3 0 / 2 0 2 5	1 2 / 3 1 / 2 0 2 4
Eq i ty u
Su bsc i be d c ita l r ap	1 9, 1 1 6	1 9, 1 1 6
Res erv es	2 8 3, 9 1 1	2 6 2, 4 1 1
Acc late d o her hen ive inc t um u co mp re s om e	-5, 5 2 1	-1, 7 8 1
Eq i ty u	2 9 7, 5 0 6	2 7 9, 7 4 6
Tot l eq ity i but b le t har ho l der f attr a u a o s e s o S U S S M icro Tec S E	2 9 7, 5 0 6	2 7 9, 7 4 6
No l ia b i l i t tes n-c urr en
Pen ion lan d s im i lar itm ent s p s a n com m s	6 3 3 1,	8 0 0 1,
Pro is ion v s	2, 5 8 8	3, 9 1 1
F ina ia l de bt nc	3, 4 3 8	4, 0 6 3
F ina ia l de bt from lea b l ig ion at nc se o s	4 5, 1 2 0	5, 7 0 8
Ot her f ina ia l l ia b i l it ies nc	1, 0 2 7	1, 6 4 7
Ot her l ia b i l it ies	8 2 0	8 2 0
De fer d ta l ia b i l it ies re x	2 7, 9 8 1	2 0, 8 4 7
No l ia b i l i ies t t n-c en urr	8 3, 2 8 2	3 8, 6 1 6

Liabilities&shareholders' equity

0	1
6	2
/	/
3	3
0	1
/	/
2	2
0	0
2	2
5	4
4,	4,
6	2
6	2
3	5
1	2
2,	0,
0	5
2	7
9	8
1,	1,
2	2
6	6
1	6
6,	2,
0	2
0	5
4	8
1	1
7,	8,
1	0
5	7
0	8
3	3
0,	1,
5	5
1	4
4	6
7	9
1,	9,
1	4
2	4
3	3
9,	5,
3	1
3	1
4	7
1	1
5	8
2,	2,
0	5
8	1
7	1
5	5
3	0
2,	0,
8	8
7	7
5	3

Consolidated statement of shareholders' equity (IFRS)

as of June 30, 2025

				Ac la cum u
€ t in hou d san	Su bsc i be d c ita l r ap	A d d it ion l a i d- in c ita l p a ap	Ear ing n s re ser ve	Rem f nt o eas ure me de f ine d ben f it p lan e s	De fer d ta re xes	For ig e n c urre ncy d j ust nts a me	Tot l eq ity attr i but b le a u a har ho l der f to s e s o S S S S U M icro Tec E
As f Jan 1, 2 0 2 4 o uar y	1 9, 1 1 6	5 5, 8 2 2	1 0 1, 5 0 2	-3, 2 7 8	6 3 8	2, 8 1 7	1 7 6, 6 1 7
Ne t inc om e			8 0, 8 3 9				8 0, 8 3 9
Ot her inc * om e				1, 6 6 0	-2 0 6	-4, 2 6 9	-2, 8 1 5
To l co hen ive inc ta mp re s om e			8 0, 8 3 9	1, 6 6 0	-2 0 6	-4, 2 6 9	7 8, 0 2 4
D iv i den ds i d p a			-3, 8 2 3				-3, 8 2 3
E f fec from d ive f a bs i d iary t stm ent o su			-1, 4 3 2				-1, 4 3 2
As f Ju 3 0, 2 0 2 4 o ne	1 9, 1 1 6	5 5, 8 2 2	1 7 7, 0 8 6	-1, 6 1 8	4 3 2	-1, 4 5 2	2 4 9, 3 8 6
As f Jan 1, 2 0 2 5 o uar y	1 9, 1 1 6	5 5, 8 2 2	2 0 6, 5 9 0	-2, 0 6 5	5 4 8	-2 6 5	2 7 9, 7 4 6
Ne inc t om e			2 7, 2 3 4				2 7, 2 3 4
Ot her inc om e				5	-	-3, 7 4 4	-3, 7 3 9
To l co hen ive inc ta mp re s om e			2 7, 2 3 4	5	-	-3, 7 4 4	2 3, 4 9 5
D iv i den ds i d p a			3 -5, 7 5				3 -5, 7 5
As f Ju 3 0, 2 0 2 5 o ne	1 9, 1 1 6	5 5, 8 2 2	2 2 8, 0 8 9	-2, 0 6 0	5 4 8	-4, 0 0 9	2 9 7, 5 0 6

* Includes a reclassification effect of € 1,432 thousand from the sale of a subsidiary.

Consolidated statement of cash flow (IFRS)

for the period from January 1, 2025, to June 30, 2025

In € t hou d san	0 1 / 0 1 / 2 0 2 5 0 6 / 3 0 / 2 0 2 5 -	0 1 / 0 1 / 2 0 2 4 0 6 / 3 0 / 2 0 2 4 -
Ne f i t p t ro	2 7. 2 3 4	8 0. 8 3 9
A d j i le n inc / ( los ) ing h f low ust nts to et to o t me rec onc om e s p era ca s s
Inc / ( los ) from d isc inu d o ion ( f ta ) ont t net om e s e p era s o xes	3, 4 0 7	-5 8, 3 1 8
Am izat ion f inta i b le a ort ts o ng sse	8 4 3	7 8 8
De iat ion f ta i b le a ts p rec o ng sse	3, 1 7 1	2, 9 8 5
Pro f it / los d isp l o f inta i b le a d ta i b le a ts s o n osa ng n ng sse	7 1 8	-1
C han f re inve nto ies g e o ser ves on r	3 3 1, 1	-5 7 4
No h inte from inc f co i b le de bt t ex rt n-c as res p ens es rea se o nve	1 0 6	2 6 6
Ot her h e f fec ive inc d e t no n-c as om e a n xp ens es	-1, 9 7 5	7 0 0
C han in inve ies nto g e r	5, 2 3 3	-2 9, 5 0 5
C han in c ont t as set g e rac s	-2 0, 6 1 5	5, 0 2 8
C han in t de iva b les g e ra rec e	-2, 9 0 1	5, 0 1 4
C han in o her t set g e as s	-1, 7 2 8	-1, 8 2 7
C han in p ion is ion g e ens p rov s	-1 5 5	-1 2 5
C han in t de b les * g e ra p ay a	-7 4 0	4, 7 9 8
C han in c l ia b i l it ies ont t g e rac	-2 8, 1 7 3	5, 4 4 1

In € t hou d san	0 1 / 0 1 / 2 0 2 5 0 6 3 0 2 0 2 / / 5 -	0 1 / 0 1 / 2 0 2 4 0 6 3 0 2 0 2 / / 4 -
C han in o her l ia b i l it ies d o her is ion t t g e an p rov s	-7 4 6	2, 8 5 8
C han in t d ta l ia b i l it ies ets g e ax ass an x	-1, 3 0 5	6, 9 1 8
Ca h f low fro t ing t iv i t ies t inu ing t ion s m o p era ac – c on op era s	-1 6, 3 1 3	2 5, 2 8 5
Ca h f low fro ing iv i ies d isc inu d o ion t t t t t s m o p era ac on e p era s –	0	9 2 9
Ca h f low fro t ing t iv i t ies to ta l s m o p era ac –	-1 6, 3 1 3	2 6, 2 1 4
D is bur for her i b le a ent ot tan ts sem s g sse	-1 0, 9 0 6	-2, 7 0 6
D is bur for inta i b le a ent ts sem s ng sse	-3 2 5	-3 2 9
Ca h o f low due inve it h in s hor ia l p ut to stm ent t-te s s s w rm com me rc ap er	0	-9, 7 8 3
Ca h inc due inve it h in s hor ia l p to stm ent t-te s om e s w rm com me rc ap er	0	9, 8 9 5
Ca h f low fro inv ing iv i ies inu ing ion t t t t t ac era s m es – c on op s	-1 1, 2 3 1	-2, 9 2 3
Ca h f low fro inv t ing t iv i t ies d isc t inu d o t ion s m es ac on e p era s –	2 -1	6 9, 2 2 5
Ca h f low fro inv ing iv i ies l t t t to ta s m es ac –	-1 1, 2 4 3	6 6, 5 9 9
* Pre iou 's f ig hav bee las i f ie d, No 2 ) Ap d ix: C han te v s y ear ure s e n re c s see p en	in p ion ent at g e res

Continued on the next page ▼

Consolidated statement of cash flow (IFRS)

▼Continuation

in € t hou d san	0 1 / 0 1 / 2 0 2 5 0 6 / 3 0 / 2 0 2 5 -	0 1 / 0 1 / 2 0 2 4 0 6 / 3 0 / 2 0 2 4 -
Rep f ban k loa nt o ay me ns	-6 2 5	-6 2 5
Rep f re l an d lea l ia b i l it ies nt o nta ay me se	-2, 3 4 6	-1, 2 8 7
C han in o her f ina ia l de bt t g e nc	-5	2 9
D iv i den ds i d p a	3 -5, 7 5	-3, 8 2 3
Ca h f low fro f ina ing iv i ies inu ing ion t t t t s m nc ac - c on op era s	-8. 7 1 1	-5. 7 0 6
Ca h f low fro f ina ing iv i ies d isc inu d o ion t t t t s m nc ac on e p era s -	0	0
Ca h f low fro f ina ing t iv i t ies s m nc ac	-8. 7 1 1	0 6 -5. 7
A d j fun ds d by han f luc ion ust nts to ate tua t me cau se exc g e-r s	-8 2 2	-1 0 0
C han in c h a d c h e iva len ts g e as n as q u	-3 7. 0 8 9	8 7. 0 0 7
Fun ds he beg inn ing f t he at t o y ear	1 3 6, 2 3 9	3 8, 7 5 6
Fun ds t e d o f t he io d a n p er	9 9, 1 5 0	1 2 5, 7 6 3
( her f ca h a d c h e iva len from d isc inu d o ion ) * t ts ont t eo s n as q u e p era s	0	6 4 2
( f w h ic h c h a d c h e iva len d isp l ) ts n ot a t o as n as q u osa	4 8 9	0
Ca h f low from ing iv it ies ( inu ing ion ) inc lu d ing t t t t s op era ac con op era s :
Inte i d dur ing he io d t p t res a p er	8 9	8 1
Inte ive d dur ing io d t re res ce p er	1, 0 2 0	7 5 4
Tax i d dur ing he io d t es p a p er	1 0, 1 9 1	1, 8 6 6

* Previous year's figures have been reclassified

Selected explanatory notes

Selected notes to the half-yearly financial statements as of June 30, 2025.

(1) General recognition and measurement methods

The consolidated financial statements of SUSS MicroTec SE as of December 31, 2024, were prepared in accordance with International Financial Reporting Standards (IFRS) as adopted by the International Accounting Standards Board (IASB) and effective as of the reporting date. The present half-yearly consolidated financial statements as of June 30, 2025, which were prepared on the basis of International Accounting Standard (IAS) 34 "Interim Financial Reporting," do not contain all the information required for the preparation of the annual report and should be read in conjunction with the consolidated financial statements of SUSS MicroTec SE as of December 31, 2024.

The interim financial statements as of June 30, 2025, apply the same accounting policies as in the consolidated financial statements for the 2024 fiscal year. All interpretations of the International Financial Reporting Interpretations Committee (IFRIC) that were binding as of June 30, 2025, were applied. For further information on the specific accounting and valuation methods used, please refer to the consolidated financial statements of SUSS MicroTec SE as of December 31, 2024.

The half-yearly financial report has not been audited or reviewed by the group auditor

(2) Change in the presentation of prior-year figures

Compared to the previous half-yearly financial report for 2024, this half-year financial report for 2025 contains changes to the reported figures for the prior-year comparative figures. The adjustment relates exclusively to the presentation of cash flow from operating activities in the consolidated cash flow statement and was made due to reclassifications (see consolidated cash flow statement).

€ 0.3 million was reclassified from operating cash flow from continuing operations to discontinued operations, and € 1.6 million was reclassified from cash flow from investing activities of discontinued operations to cash flow from operating activities of discontinued operations.

(3) Changes in the scope of consolidation

The consolidated financial statements include the financial statements of SUSS MicroTec SE and all significant companies over which control is exercised in accordance with the control principle, regardless of the level of ownership.

Compared to the consolidated financial statements as of December 31, 2024, there were no changes in the scope of consolidation.

(4) Changes in estimates

For the half-yearly financial statements as of June 30, 2025, no significant changes in discretionary decisions, estimates, and assumptions that influence the application of accounting methods were made compared to the 2024 consolidated financial statements.

(5) Bonds or equity securities

No issues, repurchases, or redemptions were made during the reporting period, either for bonds or other equity securities.

(6) Dividends paid

The dividend for the 2024 financial year of € 0.30 per dividendbearing share, which was approved by the Annual General Meeting on June 3, 2025, resulted in a total dividend of € 5,734,661.40 and was paid out in the reporting period.

(7) Contingent liabilities and contingent assets

There are no contingent assets. Contingent liabilities in the form of purchase commitments decreased from € 98.8 million as of December 31, 2024, to € 95.5 million in the reporting period.

(8) Earnings per share

Basic earnings per share are calculated by dividing the net income for the period (after minority interests) attributable to the shares by the average number of shares. Diluted earnings per share are calculated by adjusting the net income for the period attributable to shareholders and the weighted average number of shares outstanding to reflect the effects of all dilutive potential shares.

The following table shows the calculation of basic and diluted earnings per share.

(10) Segment Reporting

Segment information is provided in accordance with IFRS 8. The segment information corresponds to the segmentation used for internal management purposes. SUSS reports on the Group's performance in three business segments. The Photomask Solutions segment offers equipment for the manufacture and cleaning of lithographic photomasks. The Advanced Backend Solutions segment comprises three product lines used in the advanced backend of the semiconductor industry: bonding, imaging, and coating systems. Both operating segments also offer upgrades, replacement parts, and services.

and € 0.0 million), and the Photomask Solutions segment accounted for €57.3 million (€ 7.2 million, € 17.1 million, and € 33.0 million).

Contrary to what is stated in the notes to the consolidated financial statements for the 2024 financial year, three customers each accounted for more than 10% of consolidated sales in the 2024 financial year, namely € 71.5 million, € 59.4 million, and € 47.4 million. The Advanced Backend Solutions accounted for € 158.8 million (€ 71.3 million, € 59.4 million, and € 28.1 million), and the Photomask Solutions segment accounted for € 19.6 million (€ 0.3 million, € 0.0 million, and € 19.3 million).

	0 1 / 0 1 / 0 6 / 3 -	2 0 2 5 0 / 2 0 2 5	0 1 / 0 1 / 2 0 2 4 0 6 / 3 0 / 2 0 2 4 -
in € t hou d san	To l ta	Ear ing har n e in s p er s € ( bas ic )	To l ta	Ear ing har n e in s p er s € ( bas ic )
Ear ing fter tax ( t inu ing t ion ) n s a es con op era s f w h ic h s har ho l der f S U S S M icro Tec S E o e s o	3 0, 6 4 1	1. 6 0	2 2, 5 2 1	1. 1 8
Ear ing fter ( d isc inu d o ion ) tax ont t n s a es e p era s f w h ic h s har ho l der f S U S S M icro Tec S E o e s o	-3, 4 0 7	-0, 1 8	5 8, 3 1 8	3, 0 5
Ne f i / ( los ) t p t ro s f w h ic h s har ho l de f S U S S M icro Tec S E o e rs o	2 7, 2 3 4	1. 4 2	8 0, 8 3 9	4. 2 3
We ig hte d a ber f ou d ing har tsta ver ag e n um o n s es	1 9, 1 1 5, 5 3 8		1 9, 1 1 5, 5 3 8

(9) Related party transactions

In the first half of 2025, there were no significant transactions with related parties that are subject to disclosure requirements under IAS 24.

The Central Group Functions segment reflects the non-attributable expenses and income of the central group functions.

SUSS management controls the group on the basis of the goods and services offered in the two operating business segments.

During the reporting period, three customers each accounted for more than 10 % of consolidated sales, namely € 50.9 million, € 48.2 million, and € 33.0 million. The Advanced Backend Solutions segment accounted for € 74.7 million (€ 43.7 million, € 31.1 million,

Segment reporting (IFRS)

Se in for ion by bus ine t t t ma g me n ss seg me n
	A dva d Bac ken d nce So lut ion s		P hot k om as So lut ion s		* M icro Op ics t		Ce l Gro ntra up Fun ion ct s		Co l i dat ion nso E f fec ts		Tot l a
in € t hou d san	6 M / 2 0 2 5	6 M / 2 0 2 4	6 M / 2 0 2 5	6 M / 2 0 2 4	6 M / 2 0 2 5	6 M / 2 0 2 4	6 M / 2 0 2 5	6 M / 2 0 2 4	6 M / 2 0 2 5	6 M / 2 0 2 4	6 M / 2 0 2 5	6 M / 2 0 2 4
Ext l sa les ern a	1 7 0, 0 9 3	1 3 6, 0 2 2	9 6, 3 4 2	5 6, 7 5 0	-	1, 3 2 9	-	4			2 6 6, 4 3 5	1 9 4, 1 0 5
Inte l Sa les rna	-	-	-	-	-	-	-	-	-	-	-	-
To l Sa les ta	1 7 0, 0 9 3	1 3 6, 0 2 2	9 6, 3 4 2	5 6, 7 5 0	-	1, 3 2 9	-	4		-	2 6 6, 4 3 5	1 9 4, 1 0 5
Gro f it ss p ro	5 9, 6 4 9	5 7, 5 0 3	3 8, 7 0 2	1 9, 6 2 6	-	-5 5	6 3 4	-3 1 0			9 8, 9 8 5	7 6, 7 6 4
Gro f it m in ss p ro arg	3 5. 1 %	4 2. 3 %	4 0. 2 %	3 4. 6 %		-4. 1 %					3 7. 2 %	3 9. 5 %
Ot her / inc ( ) nt e net se g me xp ens es om e	-4 1, 6 5 0	-3 6, 1 7 7	-1 0, 9 5 4	-8, 6 1 0	-	-2 7 0	-7. 9 1 8	5 7, 0 5 4			-6 0. 5 2 2	1 1, 9 9 7
her f inte t nt c ost eo rse g me l loc ion ( ) at net a	-7, 5 2 4	-6, 8 9 9	-3, 0 4 2	-2, 2 1 6	-		1 0, 5 6 6	9, 1 1 5			-	-
her f ce l se ice f t ntra eo rv s o S U S S M icro Tec S E	-7, 5 2 4	-6, 8 9 9	-3, 0 4 2	-2, 2 1 6	-	-	1 0, 5 6 6	9, 1 1 5			-	-
Re l t p t ( E B I T ) su er s eg me n	1 7, 9 9 9	2 1, 3 2 6	2 7, 7 4 8	1 1, 0 1 6	-	-3 2 5	-7, 2 8 4	5 6, 7 4 4			3 8, 4 6 3	8 8, 7 6 1
E B I T m in arg	1 0. 6 %	1 5. 7 %	2 8. 8 %	1 9. 4 %	-	-2 4. 5 %	-				1 4. 4 %	4 5. 7 %
Ear ing be fore tax n s es	1 9 6 7, 5	2 1, 2 9 7	2 7, 7 4 7	1 1, 0 1 5	-	-3 2 5	-6, 3 6 3	8, 0 6 5 7			3 9, 3 9 4	9 0, 0 6 3
S ig i f ica h item nt n n on- cas s	-5 2 5	-3, 6 2 2	-9 1 8	2, 6 0 4	-	-	2 7	3 7 6			-1, 4 1 6	-6 4 2

* Discontinued operations

Continued on the next page. ▼

Segment reporting (IFRS)

Continuation ▼

Se in for ion by bus ine t t t g me n ma ss seg me n
	A dva d nce So lut	Bac ken d ion s	P hot So lut	k om as ion s	Op * M icro t ics		Ce Gro ntra l up Fun ion ct s		Co l i dat ion nso E f fec ts		Tot l a
in € t hou d san	6 M / 2 0 2 5	6 M / 2 0 2 4	6 M / 2 0 2 5	6 M / 2 0 2 4	6 M / 2 0 2 5	6 M / 2 0 2 4	6 M / 2 0 2 5	6 M / 2 0 2 4	6 M / 2 0 2 5	6 M / 2 0 2 4	6 M / 2 0 2 5	6 M / 2 0 2 4
Seg nt a ts me sse	3 1 3, 7 9 5	2 1 6, 6 1 3	8 0, 8 9 2	6 0, 2 2 6	-	-	1 7, 5 4 2	1 7, 9 2 1			4 1 2, 2 2 9	2 9 4, 7 6 0
her f g dw i l l t eo oo	1 8, 3 7 7	1 8, 5 6 7									1 8, 3 7 7	1 8, 5 6 7
Un l loc d a ate ts a sse											1 2 0, 6 4 6	1 5 0, 2 3 9
To ta l as ts se											5 3 2, 8 7 5	4 4 4, 9 9 9
Seg l ia b i l it ies nt me	-7 9, 7 2 1	-8 3, 4 9 9	-3 6, 5 6 8	-5 5, 8 4 8	-	-	-7, 8 8 2	-4, 1 4 9			-1 2 4, 1 7 1	-1 4 3, 4 9 6
Un l loc d l ia b i l it ies ate a											-1 1 1, 1 9 8	-4 9, 6 1 9
To l l ia b i l i ies ta t											-2 3 5, 3 6 9	-1 9 3, 1 1 5
De iat ion d a izat ion rt p rec an mo	2, 4 9 5	2, 3 9 8	6 3 4	4 3 6	-	-	8 8 5	9 3 9			4, 0 1 4	3, 7 7 3
t her f sc he du le d eo	2, 9 4 5	2, 3 9 8	6 3 4	3 6 4	-	-	8 8 5	9 3 9			0 4, 1 4	3, 3 7 7
her f imp irm los t ent eo a s	-	-	-	-	-	-	-	-			-	-
Ca i ta l ex d i tur p p en e	8, 0 8 7	2, 0 2 8	2, 2 1 8	6 2 4	-	-	9 2 6	3 8 3			1 1, 2 3 1	3, 0 3 5
3 0 Em loy f Ju p ee s a s o ne	2 0 8 1,	0 3 0 1,	2 6 7	2 3 7	-	-	5 7	3 4			3 2 1, 5	3 0 1, 1

* Discontinued operations

Segment reporting (IFRS)

Segment information by region

	Sa	les	Ca ita l ex p	d itur p en e	Ass ets ( it hou Go dw i l l ) t w o
in € t hou d san	H 1 / 2 0 2 5	H 1 / 2 0 2 4 *	H 1 / 2 0 2 5	H 1 / 2 0 2 4 *	H 1 / 2 0 2 5	H 1 / 2 0 2 4 *
E M E A	1 7, 9 1 7	1 3, 9 7 2	4, 4 6 8	2, 1 7 0	2 9 8, 3 3 7	2 5 4, 8 8 0
No h Am ica rt er	2 5, 9 4 1	7, 8 0 8	4 4	-	5, 6 7 8	2, 9 7 8
As ia a d Pac i f ic n	2 2 2, 5 7 7	1 2, 3 2 7 5	6, 1 9 7	8 6 5	9 8 0 5, 4	2 0 8 0 4,
Co l i dat ion f fec ts nso e					6 3 -5, 4	-5, 7 4 5
To l ta	2 6 6, 4 3 5	1 9 4, 1 0 5	1 1, 2 3 1	3, 0 3 5	3 9 3, 8 5 2	2 7 6, 1 9 3

* Including discontinued operations.

Segment reporting under IFRS – Reconciliations and disclosures related to discontinued operations

The following reconciliations of sales and the performance indicators EBIT and EBT from continuing operations are presented in accordance with the consolidated income statement

Reconciliation – sales

in € t hou d san	0 1 / 0 1 / 2 0 2 5 0 6 / 3 0 / 2 0 2 5 -	0 1 / 0 1 / 2 0 2 4 0 6 / 3 0 / 2 0 2 4 -
Sa les d ing ing to nt r ort ac cor seg me ep	2 6 6, 4 3 5	1 9 4, 1 0 5
M icro Op ics les t sa -	-	-1, 3 2 9
Op Gro les by M icro t ics it h ies + s a w up com p an	-	-
les by Gro ies it h M icro Op ics t + s a up com p an w
Sa les d ing to t he ta tem t o f inc ac co r s en om e	2 6 6, 3 4 5	9 2, 6 1 7 7

Reconciliation of EBIT to earnings from continuing operations (before taxes)

in € hou d t san	0 1 / 0 1 / 2 0 2 5 0 6 / 3 0 / 2 0 2 5 -	0 1 / 0 1 / 2 0 2 4 0 6 / 3 0 / 2 0 2 4 -
E B I T a d ing ing to nt r ort cco r seg me ep	3 8, 4 6 3	8 8, 7 6 1
F ina ia l inc + nc om e	0 1, 7 7	0 9 1, 5
F ina ia l ex nc p ens es -	-1 9 1	-2 0 6
Gro E B T up	3 9, 3 9 4	9 0, 0 6 4
E B T M icro Op ics t nt se g me -	-	-3 2 5
Ga in o d isp l osa n -		-5 9, 0 0 6
Exp late d to he le o f su bs i d iary t ens es re sa +	3, 4 3 3	-
E B T a d ing to t he ta tem t o f inc cco r s en om e	4 2, 7 8 2	3 1, 3 8 3

(11) Report on post-balance sheet date events

No material reportable events occurred after the end of the interim reporting period.

Note on the Half-Year Financial Report

The half-year financial statements and interim management report have neither been audited in accordance with Section 317 of the German Commercial Code (HGB) nor reviewed by the auditor.

Note on rounding

Due to rounding, individual figures in this document may not add up precisely to the stated totals, and percentages shown may not accurately reflect the absolute values to which they relate.

Responsibility statement

To the best of our knowledge, and in accordance with the applicable reporting principles for half-yearly financial reporting, the half yearly consolidated financial statements give a true and fair view of the assets, liabilities, financial position and profit or loss of the group, and the interim management report of the group includes a fair review of the development and performance of the business and the position of the group, together with a description of the material opportunities and risks associated with the expected development of the group for the remaining months of the financial year.

Garching, Germany, August 5, 2025

The Management Board of SUSS MicroTec SE

Signed

Burkhardt Frick CEO Dr. Cornelia BallwießerCFO Dr. Thomas Rohe

COO

Financial Calendar 2025

Ha l f-y ly f ina ia l re t ea r nc p or	Au 7, 2 0 2 5 t g us
Qu ly f Se be 3 0, 2 0 2 5 ter ta tem t a tem ar s en s o p r	No be 6, 2 0 2 5 ve m r
Ca i l Ma ke Da 2 0 2 5, Ga h ing Ge ta ts p r rc rm an y y ,	No be 1 7, 2 0 2 5 ve m r

Contact

SUSS MicroTec SE Schleissheimer Straße 90 85748 Garching, Germany

Email: info@suss.com

Investor Relations Phone: +49 89 32007-151 / -161

Email: ir@suss.com

Forward-looking statements: This Half-yearly financial report includes forward-looking statements. Forward-looking statements do not present historical facts but include statements about expectations and the views of the management of SUSS MicroTec SE. These statements are based on current plans, estimates, and forecasts of the Company's management. Investors should not place undue reliance on these statements. Forward-looking statements are to be understood in the context of the time at which they were made. The Company does not assume any obligation to update the forward-looking statements included in this report as a result of new information or future events. The Company's obligation to comply with its statutory responsibilities regarding information and reporting remains unaffected. Forward-looking statements always involve risks and uncertainties. A large number of factors that are described in this report could cause actual events to deviate substantially from the forward-looking statements included in this report.

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