SÜSS MicroTec SE

Quarterly Report • May 6, 2010

quarterly report 2010

1 January – 31 March

Key figures

in 1 million	Q1 / 2010	Q1 / 2009	Change
Continuing operations
Order entry	32.3	15.9	103.1%
Order backlog as of 03/31	75.4	59.2	27.4%
Total sales	21.9	22.5	-2.7%
Sales margin	-4.9%	-4.9%	0.0%-points
Gross profit	6.8	9.2	-26.1%
Gross margin	31.1%	40.9%	-9.8%-points
Costs of sales	15.1	13.3	13.5%
R&D costs	1.5	1.3	15.4%
Continuing operations
EBITDA	1.6	0.5	220.0%
EBITDA margin	7.4%	2.2%	5.2%-points
EBIT	-0.1	-0.8	87.5%
EBIT margin	-0.2%	-3.6%	3.4%-points
Earnings after tax	-0.7	-1.1	36.4%
Earnings per share	-0.04	-0.06	33.3%
Continuing and discontinued operations
Earnings after tax	-1.1	-1.1	0.0%
Earnings per share	-0.06	-0.06	0.0%
Balance sheet and cash flow
Equity	86.6	91.1	-4.9%
Equity ratio	60.9%	62.0%	-1.1%-points
Return on equity	-1.2%	-1.2%	0.0%-points
Balance sheet total	142.3	146.9	-3.1%
Net cash	11.0	11.6	-5.2%
Free cash flow*	-1.3	1.9	-168.4%
Further key figures
Investments	0.6	1.9	-68.4%
Investment ratio	2.9%	6.9%	-4.0%-points
Depreciation	1.7	1.3	30.8%
Employees as of 03/31**	579	521	11.1%
Employees as of 03/31***	585	659	-11.2%

* before consideration of purchase or sale of available-for-sale securities and before

consideration of extraordinary items from purchase or sale of subsidiaries

** continuing operations

*** continuing and discontinued operations

Contents

Foreword

Foreword by the Management Board	04
Highlights Highlights 2010	06
Investor Relations
Investor Relations	08
The SUSS MicroTec Share	08
Ownership Information as of March 31, 2010	09
Share Ownership by Officers and Related Parties
as of March 31, 2010	09
Business Development
Overview	10
Orders Position and Sales by Region	10
Lithography Division	11
Substrate Bonder Division	12
Photomask Equipment Division	12
Others Division	13
Financial Report (IFRS )
Consolidated Statement of Income	14
Statement of Comprehensive Income	15
Consolidated Balance Sheet	16
Consolidated Statement of Cash Flows	18
Consolidated Statement of Shareholders' Equity	20
Segment Reporting	22
Selected Explanatory Notes	24
Service
Legal Structure of the Group	30
Financial Calendar 2010	31

Credits 31 Contact 31

Foreword by the management board

Dear Shareholders, Ladies and Gentlemen,

The first quarter of the 2010 fiscal year was predominantly shaped by the successful conclusion of two strategic investment and divestment projects. As a result of the sale of the Test Systems division to the American competitor Cascade Microtech, Inc., we will be able to focus from now on entirely on our manufacturing solutions for microstructuring in microelectronics. Parallel to the sale, we acquired HamaTech APE, the world's leading supplier of equipment for the cleaning of photo masks in semiconductor lithography, from Singulus Technologies AG. With the acquisition, we not only strategically expanded our product portfolio in the area of wet processing, but with the purchase of the modern production facility at HamaTech's Sternenfels site, we simultaneously set the stage for its expansion into a Group-wide competence center for wet processing. The consolidation of the two neighboring production sites at Vaihingen and Sternenfels is already underway and will be completed as early as the first half of 2010.

The Quarter in Figures

While order entry of 132.3 million in the first three months (Q1 2009: 115.9 million; +103.1%) particularly reflected the readiness of Asian production clients to invest, sales of 121.9 million in the first quarter were at a similar level to the corresponding quarter of the previous year (Q1 2009: 122.5 million). The subdued sales development in the months from January to March was primarily influenced by the extraordinarily strong sales generation in the fourth quarter and discharging delays in the Substrate Bonder area. The order backlog as of March 31, 2010 rose by 27.4% compared with a year earlier to 175.4 million (March 31, 2009: 159.2 million).

Earnings before interest and taxes (EBIT) of 1-0.1 million were slightly negative, but significantly improved from the 1-0.8 million in the previous year. EBIT includes a gain of bargain purchase of 11.4 million from the purchase price allocation of HamaTech APE during its initial consolidation. Earnings after taxes (EAT) amounted to 1-1.1 million, compared with 1-1.1 million in the corresponding quarter of the previous year. The basic earnings per share (EPS) therefore totaled 1-0.06 (Q1 2009: 1-0.06).

The free cash flow before consideration of securities and extraordinary effects from M&A activities as of the end of the quarter came to 1-1.3 million, after 11.9 million in the corresponding period in the previous year. As of March 31, 2010, SUSS MicroTec Group therefore had cash and interestbearing securities of 122.8 million (March 31, 2009: 124.4 million). As a result of the HamaTech acquisition, the net cash position declined in comparison to the end of the 2009 fiscal year from 118.4 million to 1 11.0 million as of the end of the quarter (March 31, 2009: 111.6 million).

Michael Knopp

Frank Averdung CEO

Outlook

We are currently assuming that in the current fiscal year the Company will achieve sales of over 1120 million as well as an improved EBIT compared to the previous year and a positive free cash flow (before completed M&A transactions are taken into account).

Garching, Germany, May 2010

Frank Averdung Michael Knopp Chief Executive Officer Chief Financial Officer

Highlights

SUSS MicroTec Sets a Strategic Course – Changes in the Group Structure

At the very beginning of the new fiscal year, SUSS MicroTec was already able to conclude two strategic investment and divestment projects successfully. Through the acquisition of HamaTech APE, one of the world's leading equipment suppliers for the cleaning of photo masks in the semiconductor industry, the Company strategically extended its product portfolio in the area of wet processing, which previously consisted of the Coater and Developer lines. With the acquisition of the state-of-the-art HamaTech production facility at the Sternenfels site, we have simultaneously set the stage for its expansion into a Group-wide competence center. The consolidation of the Vaihingen and Sternenfels production sites in Germany is already underway. Parallel to the acquisition of HamaTech APE, SUSS MicroTec severed its ties to its subsidiary SUSS MicroTec Test Systems GmbH, which is located in Sacka near Dresden. The recently unprofitable Test Systems division was sold to the American competitor Cascade Microtech, Inc., one of the world's leading manufacturers of electronic probe and testing systems for integrated circuits.

New Subsidiary HamaTech APE Successfully Completed Initital Stage of Cooperation Program with Belgian Interuniversity Microelectronics Center (IMEC)

In mid-February, IMEC, the Belgian research center for nanoelectronics, was the first and only institute in the world to equip its cleanroom with a mask integrity infrastructure for extreme ultraviolet lithography (EUV) cleaning research, made possible through a development cooperation agreement with HamaTech APE. With the successful installation of MaskTrack Pro, a mask cleaning and processing system, HamaTech APE successfully concluded the first phase of the development cooperation agreement. Both partners are pursuing the goal of developing a process by the end of 2010 that enables the

1

gentle cleaning of EUV masks and their sensitive structures while reducing the risk of contamination during handling or storage.

SUSS MicroTec Continues to Expand its Activities in the Manufacture of Wafer-level Cameras

Q-Technology Limited (Q-Tech), a globally operating manufacturer of compact camera modules, successfully completed the installation of a complete equipment set from SUSS MicroTec in Kunshan, in the Jiangsu Province of China. Q-Tech now uses not only SUSS MicroTec's 200mm Mask and Bond Aligner, but also its Spin and Spray Coater and Substrate Bonder for the manufacture of wafer-level cameras. The applied wafer-level camera technology involves an innovative manufacturing process, in which camera modules are assembled at the wafer level. This enables a significant reduction in module size compared with conventional manufacturing processes. Applications for cameras produced in this manner can be found in smartphones, PDAs, and cellular telephones, as well in security solutions.

• 1: The new production facility at the Sternenfels site
• 2: MaskTrack Pro – the state-ofthe-art photomask cleaning solution of HamaTech APE specially designed for device nodes < 22nm
• 3: The Delta AltraSpray Coater of SUSS with proprietary spray design for patterning across servere topography

Investor relations

The SUSS MicroTec Share

The SUSS MicroTec share began the 2010 fiscal year at a price of 14.45. Despite positive corporate news, the share lost ground slightly in the first three months of the year and closed approximately 6% lower at 13.88 on March 31, 2010. By contrast, the Prime IG Semiconductor 60 90

industry index continued its positive momentum in the first quarter of 2010 and closed the quarter approximately 28% higher than at the end of 2009. TecDAX, the German share index for the 30 largest technology issues, did not display a decisive trend and ended the quarter up approximately 1%.

Foreword	Highlights	Investor Relations	Business Performance	F inancial Report	S ervice	9

The average daily trading volume of SUSS MicroTec shares on all German stock exchanges increased in the first quarter of 2010 to 85,167 shares (Q1 2009: average daily trading volume of 25,544 shares).

Share Ownership by Officers and Related Parties as of March 31, 2010
	Shares	Options
Management Board
Frank Averdung	27,500	67,500
Michael Knopp	22,500	97,500
Supervisory Board
Dr. Stefan Reineck	9,600	40,000
Jan Teichert	0	0
Sebastian Reppegather	0	0

Business Development

Overview

While order entry of 132.3 million in the first three months (Q1 2009: 115.9 million) particularly reflected the readiness of Asian production clients to invest, sales of 121.9 million in the first quarter were 2.7% weaker than in the corresponding quarter in the previous year (Q1 2009: 122.5 million). The reasons for the subdued sales development in the months from January to March were primarily the extraordinarily strong sales generation in the fourth quarter and machine delivery delays in the Substrate Bonder area. The order backlog as of March 31, 2010 amounted to 175.4 million (March 31, 2009: 159.2 million).

Earnings before interest and taxes (EBIT) of 1-0.1 million were slightly negative, but significantly improved from the 1-0.8 million in the previous year. Operating income includes a gain of bargain purchase of 11.4 million, which was determined based on the purchase price allocation for HamaTech APE during its initial consolidation. Earnings after taxes (EAT) amounted to 1-1.1 million, compared with 1-1.1 million in the corresponding quarter of the previous year. The basic earnings per share (EPS) therefore totaled 1-0.06 (Q1 2009: 1-0.06).

The free cash flow before consideration of securities and extraordinary effects from M&A activities at the end of the quarter came to 1 -1.3 million after 1 1.9 million in the corresponding period in the previous year. As of March 31, 2010, SUSS MicroTec Group therefore had cash and interest-bearing securities of 122.8 million (March 31, 2009: 124.4 million). As a result of the HamaTech acquisition, the net cash position declined in comparison to the end of the 2009 fiscal year from 118.4 million to 1 11.0 million as of the end of the quarter (March 31, 2009: 111.6 million).

Orders Position and Sales by Region

The regional distribution of orders demonstrated significant growth in all regions with the exception of Japan. Although the regions of North America (51.1%), Europe (124.1%), and Rest of Asia (147.9%) each recorded double-digit growth rates in order entry, order entry in the Japan region fell by 8.3% from the corresponding quarter in the previous year.

The distribution of sales by region demonstrates a trend contrary to that of the first quarter of last year. While the regions of North America (-37.5%) and Europe (-63.0%) each recorded significant declines in sales, the regions of Japan and the Rest of Asia recorded sales increases of 94.4% and 81.8%, respectively.

Lithography

The Lithography division includes the development, manufacture, and sale of the Mask Aligner, Developer, and Coater product lines. These product lines are manufactured and produced in Germany at the locations in Garching near Munich and Vaihingen an der Enz. However, the relocation of Coater and Developer production from Vaihingen to Sternenfels, which is approximately 20km away, is scheduled for as early as the first half of 2010.

In the first three months of the 2010 fiscal year, the Lithography division experienced a significant upturn in order entry, while sales were slightly lower than in the previous year. Order entry of 126.2 million was 184.8% higher than its total of 19.2 million a year earlier. The reason for the positive trend was the revival of investment readiness on the part of Asian production clients. However, division sales in the first quarter of 2010 amounted to only 116.0 million after 116.9 million in the previous year's quarter. The division earnings improved from 11.4 million to 11.9 million.

Substrate Bonder

The Substrate Bonder division comprises the development, production, and sale of the Substrate (Wafer) Bonder product line and is located at the site in Waterbury, Vermont (USA) site.

In the first quarter of the new fiscal year, the Substrate Bonder division recorded declines in both order entry and sales compared with the corresponding quarter in the previous year. While order entry fell by 20.3% to 14.7 million (Q1 2009: 15.9 million), sales dropped by 42.9% from 14.2 million to 12.4 million. The reason for the negative trend in sales was discharging delays for a few large production Bonders. Division earnings as of the end of the quarter of 1-2.1 million (Q1 2009: 1-0.5 million) deteriorated as a result of lower sales.

Photomask Equipment

The Photomask Equipment division includes the development, manufacture, and sale of the HMx, ASx, and MaskTrack product lines of HamaTech APE GmbH & Co. KG, which was acquired on February 15, 2010. The development and production of specialized systems for the cleaning and processing of photo masks for the semiconductor industry are conducted at the Sternenfels site near Stuttgart.

The Photomask Equipment division achieved order entry of 10.3 million and division sales of 12.2 million in the one-month period since initial consolidation. Division earnings for the period under review in the first quarter recorded a loss of 10.5 million.

Others

The Others division comprises the Mask business in Palo Alto, California (USA) that caters to the semiconductor industry and the Microoptics activities at the Neuchâtel, Switzerland location as well as the C4NP business as well as costs for central Group functions that generally cannot be attributed to the main divisions.

While division sales of 11.3 million remained constant compared with the previous year, order entry improved by 37.5% to 11.1 million (Q1 2009: 10.8 million). In quarterly comparison, the Mask business generated order entry growth of 10.1 million to 10.5 million (Q1 2009: 10.4 million). By contrast, sales fell compared with the previous year's quarter by 10.3 million to 10.5 million (Q1 2009: 10.8 million). However, the Micro-optics business was able to achieve increases in both order entry and sales. In the first three months of the year, order entry totaled 10.6 million after 10.4 million in the corresponding quarter of the previous year. Sales rose in quarterly comparison from 10.4 million to 10.7 million.

Financial Report

Consolidated Statement of Income (IFRS)

	01/01/2010 –	01/01/2009 –
in 1 thousand	03/31/2010	03/31/2009
Sales	21,893	22,451
Cost of sales	-15,079	-13,264
Gross profit	6,814	9,187
Selling costs	-3,366	-4,627
Research and development costs	-1,499	-1,268
Administration costs	-3,679	-3,490
Other operating income	2,484	1,172
Other operating expenses	-805	-1,776
Analysis of net income from operations (EBIT):	1,617	466
Depreciation and amortization of tangible assets, intangible assets and investments in subsidiaries	-1,668	-1,268
Net income from operations (EBIT)	-51	-802
Financial income/expense	-272	-49
Proft or loss from continuing operations before taxes	-323	-851
Income taxes	-387	-202
Proft or loss from continuing operations	-710	-1,053
Net profit or loss from discontinued operations (after taxes)	-364	-20
Profit or loss	-1,074	-1,073
Thereof equity holders of SUSS MicroTec	-1,084	-1,058
Thereof minority interests	10	-15
Earnings per share (undiluted)
Basic earnings per share from continuing operations in 1	-0.04	-0.06
Basic earnings per share from discontinued operations in 1	-0.02	0.00
Earnings per share (diluted)
Basic earnings per share from continuing operations in 1	-0.04	-0.06
Basic earnings per share from discontinued operations in 1	-0.02	0.00

Statement of Comprehensive Income (IFRS)

in 1 thousand	01/01/2010 – 03/31/2010	01/01/2009 – 03/31/2009
Net profit or loss	-1,074	-1,073
Fair value fluctuations of available for sale securities	-102	89
Foreign currency adjustment	1,655	1,586
Cash flow hedges	0	-151
Deferred taxes	31	18
Total income and expenses recognized in equity	1,584	1,542
Total income and expenses reported in the reporting period	510	469
Thereof equity holders of SUSS MicroTec	500	490
Thereof minority interests	10	-21

Consolidated Balance Sheet (IFRS)

in 1 thousand Assets	03/31/2010	12/31/2009
Non-current assets	45,583	39,954
Intangible assets	14,784	13,837
Goodwill	13,599	13,599
Tangible assets	8,775	4,081
Current tax assets	177	121
Other assets	527	554
Deferred tax assets	7,721	7,762
Current assets	96,683	96,480
Inventories	53,625	40,790
Accounts receivable	14,752	14,842
Other financial assets	290	355
Securities	11,878	10,489
Current tax assets	72	265
Cash and cash equivalents	13,170	20,621
Other assets	2,896	1,595
Assets classified as held for disposal	0	7,523

Total assets	142,266	136,434

y in 1 thousand Liabilities & share holders ' equit	03/31/2010	12/31/2009
Equity	86,615	86,060
Total equity attributable to shareholders of SUSS MicroTec AG	86,404	85,859
Subscribed capital	17,019	17,019
Reserves	68,554	69,583
Accumulated other comprehensive income	831	-743
Minority interests	211	201
Non-current liabilities	20,144	19,988
Pension plans and similar commitments	3,091	3,003
Provisions	675	711
Financial debt	10,720	10,962
Other financial liabilities	70	67
Deferred tax liabilities	5,588	5,245
Current liabilities	35,507	30,386
Provisions	3,190	1,772
Tax liabilities	584	595
Financial debt	1,003	1,747
Other financial liabilities	4,576	4,536
Accounts payable	7,002	4,458
Other liabilities	19,152	14,906
Liabilities associated with assets classified as held for disposal	0	2,372
Total liabilities & shareholders' equity	142,266	136,434

Consolidated Statement of Cash Flows (IFRS)

in 1 thousand	01/01/2010 – 03/31/2010	01/01/2009 – 03/31/2009
Net profit or loss (after taxes)	-1,074	-1,073
Amortization of intangible assets	944	869
Depreciation of tangible assets	739	474
Profit or loss on disposal of intangible and tangible assets	56	19
Change of reserves on inventories	-668	694
Change of reserves for bad debts	-43	40
Non-cash stock based compensation	47	28
Non-cash income from the reversal of provisions	-74	-76
Other non-cash effective income and expenses	-409	60
Bargain purchase arising from acquisition HamaTech	-1,438	0
Gain from deconsolidation of SMTTS	-781	0
Change in inventories	-5,754	610
Change in accounts receivable	2,670	8,946
Change in other assets	-917	-1,186
Change in pension provisions	203	-23
Change in accounts payable	1,030	-437
Change in other liabilities and other provisions	3,577	-5,307
Change of deferred taxes	515	115
Cash flow from operating activities –
continuing and discontinued operations	-1,377	3,753
Cash flow from operating activities – continuing operations	-1,377	3,856

	01/01/2010 –	01/01/2009 –
in 1 thousand	03/31/2010	03/31/2009
Disbursements for tangible assets	-523	-176
Disbursements for intangible assets	-111	-1,689
Purchases of current available-for-sale securities	0	-3,821
Proceeds from redemption of available-for-sale securities	1,014	0
Payments for purchase of HamaTech	-8,771	0
Proceeds from disposal of Test business	2,708	0
Cash flow from investing activities – continuing and discontinued operations	-5,683	-5,686
Cash flow from investing activities – continuing operations	-5,683	-5,684
Repayment of bank loans	0	-19
Change in current bank liabilities	-744	-2,016
Change in other financial debt	-242	-48
Cash flow from financing activities –
continuing and discontinued operations:	-986	-2,083
Cash flow from financing activities – continuing operations:	-986	-2,083
Adjustments to funds caused by exchange-rate fluctuations	417	233
Change in cash and cash equivalents	-7,629	-3,783
Funds at beginning of the year*	20,799	20,603
Funds at end of the period	13,170	16,820
Cash flow from operating activities includes:
Interest paid during the period	21	38
Interest received during period	90	166
Tax paid during the period	92	163
Tax refunds during the period	2	132

* Cash and cash equivalents as of January 01, 2010 also includes cash assets attributable to available-for-sale assets and discontinued activities (1178 thousand).

Consolidated statement of shareholders' equity (IFRS)

in 1 thousand	Subscribed capital	Additional paid-in capital
As of January 01, 2009	17,019	92,842
Issuance of subscription rights		28
Net profit loss or loss
Total income and expenses recognized in equity
As of March 31, 2009	17,019	92,870
As of January 01, 2010	17,019	93,094
Issuance of subscription rights		47
Net profit loss or loss
Total income and expenses recognized in equity
As of March 31, 2010	17,019	93,141

Equity	Minority interests	Total equity attributable to shareholders of Suss MicroTec AG	Accumulated other Comprehensive Income	Retained Earnings	Earnings reserve
90,617	247	90,370	-791	-19,133	433
28		28
-1,073	-15	-1,058		-1,058
1,542	-6	1,548	1,548
91,114	226	90,888	757	-20,191	433
86,060	201	85,859	-743	-23,944	433
47		47
-1,074	10	-1,084		-1,084
1,582	0	1,582	1,582
86,615	211	86,404	839	-25,028	433

Segment Reporting (IFRS) Segment information by business segment

	Lithography		Substrate Bonder			Photomask Equipment
in 1 thousand	Q1/2010	Q1/2009	Q1/2010	Q1/2009	Q1/2010	Q1/2009
External Sales	15,998	16,892	2,428	4,224	2,155	0
Internal Sales	0	0	0	0	0	0
Total Sales	15,998	16,892	2,428	4,224	2,155	0
Result per segment (EBIT)	1,885	1,426	-2,140	-501	-501	0
Income before taxes	1,880	1,385	-2,142	-501	-501	0
Significant non-cash items	254	-558	-664	-207	72	0
Segment assets	54,272	59,660	31,190	23,980	7,873	0
– thereof Goodwill	13,599	13,599	0	0	0	0
Unallocated assets
Total assets
Segment liabilities	-14,640	-17,302	-10,773	-6,199	-2,526	0
Unallocated liabilities
Total liabilities
Depreciation and amortisation	474	590	702	350	115	0
– thereof scheduled	474	590	702	350	115	0
– thereof impairment loss	0	0	0	0	0	0
Capital expenditure	183	348	315	540	1,962	0
Average workforce during the period	320	342	121	112	85	0

Segment information by region

	Sales		Capital expenditure		Assets
in 1 thousand	Q1/2010	Q1/2009	Q1/2010	Q1/2009	Q1/2010	Q1/2009
Europe	3,858	12,555	6,268	1,305	70,790	69,507
North-America	2,861	4,238	492	548	31,551	33,853
Japan	3,965	2,626	28	11	2,986	6,405
Rest of Asia	12,013	7,499	4	1	956	645
Rest of world	153	12	27	0	1,867	0
Consolidation effects	0	0	0	0	-2,615	-2,544
Total	22,850	26,930	6,819	1,865	105,535	107,866

Others		Continuing operations		Discontinued Operations (Test business)		Consolidation effects		Total
Q1/2010	Q1/2009	Q1/2010	Q1/2009	Q1/2010	Q1/2009	Q1/2010	Q1/2009	Q1/2010	Q1/2009
1,312	1,339	21,893	22,455	957	4,475	-	-	22,850	26,930
1,271	1,300	1,271	1,300	0	0	-1,271	-1,300	0	0
2,583	2,639	23,164	23,755	957	4,475	-1,271	-1,300	22,850	26,930
706	-1,728	-50	-803	-365	-46	-	-	-415	-849
440	-1,734	-323	-850	-366	-47	-	-	-689	-897
-20	6	-358	-759	252	-162	-	-	-106	-921
12,200	11,364	105,535	95,004	0	12,862	-	-	105,535	107,866
0	0	13,599	13,599	0	4,168	-	-	13,599	17,767
								36,731	39,042
								142,266	146,908
-2,482	-3,796	-30,421	-27,297	0	-2,448	-	-	-30,421	-29,745
								-25,230	-26,049
								-55,651	-55,794
377	328	1,668	1,268	14	75	-	-	1,682	1,343
377	328	1,668	1,268	14	75	-	-	1,682	1,343
0	0	0	0	0	0	-	-	0	0
4,359	969	6,819	1,857	0	8	-	-	6,819	1,865
53	67	579	521	6	138	-	-	585	659

Selected Explanatory Notes to the Interim Report of SUSS MicroTec AG as of March 31, 2010

1. General Accounting Policies

The consolidated financial statements of SUSS MicroTec AG as of December 31, 2009 have been prepared in accordance with the International Financial Reporting Standards (IFRSs) applied by the International Accounting Standards Board (IASB) as of the closing date. In the consolidated interim financial statements as of March 31, 2010, which were prepared on the basis of International Accounting Standards (IAS) 34 "Interim Financial Reporting," the same accounting methods were applied as in the consolidated financial statements for the 2009 fiscal year.

All of the interpretations of the International Financial Reporting Interpretations Committee (IFRIC) in effect as of March 31, 2010 have been applied.

For additional information about specific accounting and measurement methods, please see the consolidated financial statements of SUSS MicroTec AG as of December 31, 2009.

The Group auditor, KPMG AGWirtschaftsprüfungsgesellschaft, has neither audited nor reviewed the interim financial statements.

2. Changes in the Scope of Consolidation

The consolidated financial statements include the financial statements of SUSS MicroTec AG and of all material companies over which, independent of the level of its participatory investment, the proprietary company can exercise control (i.e. the control principle).

Compared with the consolidated financial statements as of December 31, 2009, the following changes were made to the scope of consolidation:

+ SUSS MicroTec AG sold the Test Systems division in accordance with the purchase agreement of January 27, 2010. The main component of the transaction was the complete sale of 100% of the shares in SUSS MicroTec Test Systems GmbH, located in Sacka near Dresden, Germany. SUSS MicroTec Test Systems GmbH was deconsolidated as of January 27, 2010.

+ With effect from February 15, 2010, SUSS MicroTec AG acquired 100% of the shares in HamaTech APE GmbH & Co. KG, based in Sternenfels, Germany, from Singulus Technologies AG. HamaTech APE GmbH & Co. KG was included in the consolidated financial statements for the first time in accordance with IAS 27 (rev. 2008) and IFRS 3 (rev. 2008) as of March 31, 2010.

There were no additional changes in the scope of consolidation.

3. Mandatory Disclosures

3.1 Sale of the Test Systems Division

On January 28, 2010, SUSS MicroTec AG announced the sale of the Test Systems division to Cascade Microtech Inc., which is based in Beaverton, Oregon (USA). The Test Systems division is located in Sacka, near Dresden. The site handles development, production, and distribution in Europe. In Asia and North America, sales are conducted via SUSS MicroTec subsidiaries or external representatives.

The main component of the transaction was the sale of all shares in SUSS MicroTec Test Systems GmbH. In addition, individual assets of foreign subsidiaries, also assigned to the Test Systems division, were sold.

The purchase price for the Test Systems division consisted of a fixed amount and an amount placed in escrow. The fixed component amounts to 14.5 million, of which 12.0 million was paid in cash and 12.5 million was paid in the common shares of the purchaser. An additional amount of 12.5 million has been placed in escrow and will be released to the seller upon meeting certain post-sale conditions. This could lead to a corresponding purchase price adjustment. As of March 31, 2010, 10.2 million had been released from the escrow account to SUSS MicroTec AG. In addition, SUSS MicroTec AG received 10.8 million in purchase price adjustments. The total amount of 11.0 million had already been taken into account in the previous year in the measurement of available-for-sale assets and liabilities.

On January 27, 2010, SUSS MicroTec Test Systems GmbH was deconsolidated. The gain from the deconsolidation amounted to 10.8 million. Overall, the EBIT of the Test Systems division (discontinued activities) was 1-0.4 million.

3.2 Purchase of HamaTech APE GmbH & Co. KG

Effective February 15, 2010, SUSS MicroTec AG acquired 100% of the shares in HamaTech APE GmbH & Co. KG, based in Sternenfels, Germany, from Singulus Technologies AG. In addition, SUSS MicroTec AG acquired the land and company buildings at the Sternenfels site as well as a company loan of approximately 110.1 million.

The purchase price for the land and company buildings totaled 14.5 million. The purchase price for the shares in HamaTech APE GmbH & Co. KG and the company loan is comprised of a fixed component of approximately 13.5 million and an earn-out component of 11 million. In addition, SUSS MicroTec AG eliminated additional inter-company receivables of Singulus Technologies AG of approximately 11.0 million, which had resulted from the ongoing operations of HamaTech APE GmbH & Co. KG since January 1, 2010. As of March 31, 2010, SUSS MicroTec AG had paid the entire (fixed) purchase price of approximately 19.0 million. A provision of 10.8 million was formed for the earn-out component.

The acquisition of the shares and assets or liabilities is recorded in the consolidated financial statements of SUSS MicroTec AG in accordance with the International Financial Reporting Standards as a business combination, as stipulated in IAS 27 (rev. 2008) and IFRS 3 (rev. 2008). In this context, the acquired assets, liabilities, and contingent liabilities (with a few exceptions) are to be recognized at fair value at the time of acquisition (IFRS 3.18). In accordance with the guidelines of IFRS 3 in connection with IAS 38, not only assets appearing in the statement of financial position are to be taken into account, but also not yet recognized intangible assets.

Against this background, a purchase price allocation was conducted for the acquired assets and liabilities. The acquired assets and liabilities were recognized at the time of initial consolidation as follows:

in 1 million	Carrying value according to IFRS	Recognized upon acquisition
Intangible assets	3.1	1.3
Tangible assets	0.3	0.4
Current assets	7.6	7.6
Total assets	11.0	9.3
Non-current liabilities	0.0	0.0
Current liabilities	2.6	2.6
Total liabilities	2.6	2.6
Net assets	8.4	6.7
Acquisition costs		4.5
Provision for earn-out		0.8
Bargain purchase		1.4

Capitalized development costs of 12.7 million, which previously had been recognized under intangible assets, were measured at the time of acquisition at 10. Instead, previously unrecognized intangible assets of 10.9 million, which primarily related to the acquired technology, were capitalized. The measurement of the technology is based on planning for the years 2010 to 2013 and the resulting cash flows. In addition, hidden reserves within tangible assets of 10.1 million were disclosed.

Gain of bargain purchase of 11.4 million is recognized with affect on net income under other operating income in accordance with IFRS 3.34.

HamaTech APE GmbH & Co. KG's income and expenses in the month of March 2010 are recorded in the consolidated statement of income. In this period, HamaTech APE contributed to consolidated earnings after taxes, sales of 12.0 million and earnings of 1-0.5 million. If SUSS MicroTec AG had already acquired HamaTech at the beginning of the reporting period, consolidated sales and earnings after taxes would have totaled 122.2 million and 1-1.6 million, respectively.

3.3 Contingent receivable

As part of the purchase of HamaTech APE GmbH & Co. KG, the seller, Singulus Technologies AG, issued an equity capital guarantee to the effect that the equity capital of HamaTech APE GmbH & Co. KG calculated in accordance with the German Commercial Code (HGB) should not fall below a certain amount as of February 15, 2010. This equity capital guarantee did not perform properly. Due to the current uncertainty as to whether the seller will honor the contractual obligations, our claim to a settlement for the amount outstanding as of March 31, 2010 in accordance with IAS 37 (31) has not been taken into account in either the initial consolidation or in the consolidated financial statements.

3.4 New Credit Agreements

On March 31, 2010, the previous bank consortium led by Fortis Bank was replaced by a new consortium led by Bayern LB. In March 2010, SUSS MicroTec AG signed credit agreements with the new bank consortium for a credit line of 16 million. The credit line initially runs until February 28, 2011 and was issued without covenants. Its primary purpose is to serve as backing for down payment guarantees.

3.5 Other Mandatory Disclosures

The securities recognized in the statement of financial position as available for sale include – as in the previous year – corporate and government bonds. The securities have been measured at market prices. Any fluctuations in the market price are recognized in equity in other comprehensive income and therefore do not affect profit and loss.

Also disclosed under this item in the statement of financial position are the 747,530 Cascade shares – with a fair value of 12.3 million as of March 31, 2010 – obtained through the sale of the Test Systems division. Fluctuations in the market price are recognized in equity in other comprehensive income and therefore do not affect profit and loss.

Other issues influencing assets, liabilities, equity, the result for the period, or cash flows and unusual in terms of their nature, magnitude, or frequency, did not arise during the interim reporting period.

4. Change in Presentation

The presentation of the consolidated financial statements as of March 31, 2010 is analogous to the presentation as of December 31, 2009. There were no changes in presentation.

5. Changes in Estimates

To the extent that estimates were made in the interim reports, the methodology underlying the estimates remained fundamentally the same during the fiscal year and in comparison to the previous fiscal year.

In a departure from the approach used at the end of the fiscal year, income tax expense in each interim reporting period is recorded on the basis of the best estimate of the weighted average annual income tax rate which is expected for the entire fiscal year.

SUSS MicroTec AG currently assumes that the annual income tax rate will deviate from the expected tax rate of approximately 28%. The primary reason for this is that the losses accrued by foreign subsidiaries cannot be capitalized.

Otherwise there are no changes requiring disclosure which would have a material impact on the current interim reporting period.

6. Bonds and Equity Securities

During the reporting period, no issuances, repurchases, or repayments occurred involving either bonds or equity securities.

7. Dividends Paid

During the reporting report, no dividend was distributed nor was such a distribution proposed.

8. Significant Events After the End of the Interim Reporting Period

No material events requiring disclosure occurred after the end of the interim reporting period.

9. Contingent Liabilities

There were no substantial changes in contingent liabilities since the previous reporting date of December 31, 2009.

10. Earnings per Share

Basic earnings per share are calculated by dividing the net profit or loss for the period (net of minority interests) by the average number of shares.

In order to calculate diluted earnings per share, the profit or loss for the period attributable to shareholders (net of minority interests) and the weighted average of outstanding shares are adjusted for the impact of all potential dilutive shares.

As a result of the quarterly loss, existing stock option plans were not taken into consideration in calculating diluted earnings per share since their inclusion would lead to a negative dilution effect.

11. Related Parties

In the previous year the Group was affected by the disclosure requirements of IAS 24 "Related Party Disclosures" with respect to business relationships with the since resigned Chairman of the Supervisory Board of SUSS MicroTec AG. The former Chairman of the Supervisory Board, Dr. Richter, was simultaneously a Management Board member of Thin Materials AG in Eichenau, Germany. In the first quarter of 2009, SUSS MicroTec AG concluded a cooperation agreement with this company. The agreement governs cooperation between the two companies in the area of thin wafer processing. As part of the agreement, SUSS MicroTec AG acquired intellectual property (IP) and expertise in the area of thin wafer handling for 10.9 million. The capitalized IP will be amortized over five years. At SUSS MicroTec AG's Shareholders' Meeting on June 24, 2009, Dr. Richter resigned from his position as Chairman of the Supervisory Board of the Company.

Legal Structure of the group

Financial calendar 2010

May 6, 2010
June,16
June 23, 2010
August 5, 2010
September 15 – 16, 2010
November 4, 2010
November 22 – 24, 2010

CREDITS AND CONTACT

Credits

Published by: SUSS MicroTec AG

Edited by: Investor Relations, Finance Concept and design: IR-One AG & Co., Hamburg Printer: BluePrint Group, Munich

Contact

Investor Relations Phone: +49 (0)89-32007-161 E-mail: ir@suss.com

Forward-looking statements: These reports contain forward-looking statements. Statements that are not historical facts, including statements about our beliefs and expectations, are forward-looking statements. These statements are based oncurrent plans, estimates, and projections,and should be understood as such. Forward-looking statements speak only as of the date they are made, and we undertake no obligation to update any of them in light of new information or future events. Forward-looking statements involve inherent risks and uncertainties. We caution readers that a number of important factors could cause actual results or outcomes to differ materially from those expressed in any forward-looking statement.

SUSS MicroTec AG Schleissheimer Strasse 90 85748 Garching, Deutschland Phone: +49 (0)89-32007-0 E-mail: info@suss.com