SÜSS MicroTec SE

Quarterly Report • May 12, 2022

KEY FIGURES

in € million	Q1 2022	Q1 2021	Change
Business Development
Order entry	117.6	81.0	45.2%
Order backlog as of March 31	249.2	148.2	68.2%
Total sales	63.3	52.6	20.3%
Gross profit	21.0	17.3	21.6%
Gross margin	33.2%	32.9%	0.3%pts
Cost of sales	42.3	35.3	19.8%
Research and Development costs	6.2	5.1	21.6%
EBITDA	4.2	3.3	27.3%
EBITDA margin	6.6%	6.3%	0.3%pts
EBIT	2.1	1.4	50.0%
EBIT margin	3.3%	2.7%	0.6%pts
Earnings after tax	1.4	0.8	75.0%
Earnings per share, basic (in €)	0.07	0.04	--
Balance sheet and cash flow
Equity	158.8	137.8	15.2%
Equity ratio	55.2%	58.2%	-3.0%pts
Balance sheet total	287.8	236.6	21.6%
Net cash	35.2	39.2	--
Free Cashflow	1.6	9.1	--
Further key figures
Investments	1.4	1.6	-12.5%
Investment ratio	2.2%	3.0%	-0.8%pts
Depreciation	2.1	1.8	16.7%
Employees as of March 31	1,194	1,041	14.7%

CONTENTS

Foreword of the Management Board		4
Business Development in the First Quarter		6
Financial Report		12
Consolidated Statement of Income (IFRS)	12
Statement of Comprehensive Income (IFRS)	13
Consolidated Statement of Financial Position (IFRS)	14
Consolidated Statement of Cash Flows (IFRS)	15
Statement of Changes in Equity (IFRS)	17
Segment Reporting (IFRS)	18

Legal Structure 19

Financial Calendar / Contact / Imprint 20

FOREWORD OF THE MANAGEMENT BOARD

Dear ladies and gentlemen,

We are pleased to report to you today the figures for the first three months of the current financial year.

In the first quarter of the current financial year, we once again achieved record order entry of EUR 117.6 million. Furthermore, with sales of EUR 63.3 million and an EBIT of EUR 2.1 million, the first quarter was significantly stronger in terms of sales and revenue than the opening quarter of the previous year. This is particularly noteworthy in light of the current economic environment, which is characterized by ongoing and significant supply chain issues. We would like to emphasize that this achievement was only possible due to our colleagues' continued commitment.

Demand for our solutions remains extremely robust in each of our divisions. We are pleased that we were able to register particularly high order growth in the Bonder and Photomask Equipment divisions. In addition, the Lithography division, which regularly records strong order entry, nearly reached the record high of the previous year's first quarter. We are glad that we have received the first order for our new wafer-to-wafer hybrid bonding solution in the first quarter. Our customer will use this system for the volume production of micro-LED displays. Also noteworthy are orders of our UV projection scanners by two new semiconductor industry customers. This is at least a first indicator that the broader sales approach for these systems which we initiated last year is already showing initial success. In the Photomask Equipment segment, large orders by a number of customers have contributed to the particularly high order intake of EUR 40.9 million: this corresponds to approximately 80% of this segment's annual revenue last year.

In the first quarter, like most companies that are comparable to us, we have once again seen significant and ongoing delivery delays of a multitude of parts and components. The causes of this are not new: they are the result of the economic impact of the COVID-19 pandemic and its continued lockdowns. This is particularly the case in China, where a number of our suppliers source components to manufacture vendor parts that we order. Added to this is the war in Ukraine, which, though it has little direct impact on our business, considerably impacts, e.g., airfreight routes to Asia, along which we ship most of our tools; and finally greater demand due to the resulting uncertainty. For several months, our teams have been putting in considerable effort and overtime just to compensate, to the extent possible, for these delivery delays and disruptions – and they have succeeded in many instances. Against this background, we are pleased with the revenue growth of 20.3% to EUR 63.3 million, and the accompanying earnings growth compared with the prior year's first quarter. We note the particularly strong revenue growth in the Bonder segment, as well as the similarly significant growth in the Micro-optics segment, which has realized EUR 10.6 million in revenue and with that, has surpassed EUR 10 million revenue in a single quarter for the first time. This segment has also realized a positive EBIT margin of 6.7%, driven in part by yield improvements achieved during this quarter. This shows that the EBIT loss in the fourth quarter of last year was indeed primarily driven by rampup cost related to the production start of microlens arrays for low-beam headlights that quarter.

In the first three months of the current financial year, revenue at SÜSS MicroTec amounted to EUR 63.3 million, 20.3% higher than the prior year's figure of EUR 52.6 million. At EUR 2.1 million, EBIT for the first three months was low, but still above the previous year's amount of EUR 1.4 million. This was also the case for the EBIT margin of 3.3% (previous year: 2.7%) Following a further increase in working capital in the first quarter, which was also driven in large part by supply chain problems, free cash flow of EUR 1.6 million in the first quarter was significantly lower than the prior-year amount of EUR 9.1 million. We are very pleased by the new record order entry of EUR 117.6 million; however, it remains the case that the timing of major orders in the future will cause order entry to fluctuate significantly from quarter to quarter, so that a positive or negative trend cannot be derived from this alone.

The impact of the COVID-19 pandemic has continued to affect our business in the first quarter. Case numbers in Germany at some point in the quarter were at their highest level since the beginning of the pandemic, before falling to a still-high level. Even though serious illness has been largely avoided as a result of high vaccination rates, this has led to increased levels of sick leave, in addition to the supply chain problems mentioned earlier. We continue to maintain extensive protective measures at SÜSS MicroTec in order to protect our employees, their family members, our business partners and the Company as well we can. This allows us to minimize the economic impact on our business and to continue serving our customers as effectively as possible despite the pandemic. Nevertheless, in the first quarter we were also not able to complete all planned deliveries as scheduled: some deliveries were once again pushed back beyond the end of the quarter. As in the previous quarter, causes were primarily operational in nature, such as supply chain and logistics delays.

The further development of the 2022 financial year will largely depend on the timing of the resolution of the current supply chain bottlenecks. Planned delivery dates and sales for a number of systems will be postponed from the first to the second half of the year. We also expect that not all orders planned for 2022 can be completed before the end of the year. The supply situation also influences our ability to make forecasts for the current fiscal year. We continue to expect revenue between EUR 270 million and EUR 300 million as well as an EBIT margin between 8.5% and 10.5% in 2022.

Garching, Germany, May 12, 2022

Dr. Goetz M. Bendele Oliver Albrecht Dr. Thomas Rohe Chief Executive Officer Chief Financial Officer Chief Operations Officer

BUSINESS DEVELOPMENT IN THE FIRST QUARTER OF 2022

The first quarter of 2022 was characterized by a continuously strong order intake. From January to March 2022, we recorded new orders of EUR 117.6 million (2021: EUR 81.0 million). The 45.2 percent increase was mainly driven by strong demand in the Photomask Equipment and Bonder divisions.

Sales in the first quarter of 2022 reached EUR 63.3 million, marking an increase of EUR 10.7 million over the EUR 52.6 million achieved in the previous year's quarter. Much of the year-onyear growth was attributable to gains in sales in the Bonder and Micro-optics divisions. The Lithography division also continued to improve sales and profitability in the first three months of 2022. Photomask Equipment was the only division to record a decline in sales, whereby the lack of material availability led to delays in the completion and delivery of individual systems.

At EUR 2.1 million, EBIT for the first three months was low, but still above the previous year's amount of EUR 1.4 million. This results in an EBIT margin for the first three months of 3.3 percent(previous year: 2.7 percent). Earnings after taxes (EAT) improved to EUR 1.4 million (previous year: EUR 0.8 million). The basic earnings per share (EPS) amount to € 0.07 (previous year: € 0.04).

Following a further increase in working capital in inventories of EUR 15.1 million in the first quarter, free cash flow of EUR 1.6 million was significantly lower than the prior-year amount of EUR 9.1 million. The net cash position decreased from EUR 39.2 million as of March 31, 2021 to EUR 35.2 million as of March 31, 2022.

Regional sales increased from EUR 8.4 million to EUR 11.5 million in Europe and from EUR 5.6 million to EUR 8.3 million in North America in the first three months of 2022. Asia also recorded growth from EUR 38.6 million to EUR 43.5 million.

BUSINESS DEVELOPMENT IN THE INDIVIDUAL DIVISIONS

Lithography

The Lithography division includes the development, manufacture, and sale of the mask aligner and UV projection scanner product lines, coater/developer products, nano imprint equipment, and semi- and fully-automated devices for inkjet printing-based coating processes. These product lines are manufactured in Germany at the locations in Garching, near Munich, and in Sternenfels, as well as at the Hsinchu location in Taiwan.

in € million	Q1 2022	Q1 2021
Order entry	49.4	52.1
Sales*	33.4	32.3
Gross Profit	12.0	10.5
Gross Profit Margin*	35.9%	32.5%
EBIT	2.9	2.7
EBIT-Margin*	8.7%	8.3%
Net assets	53.7	53.8

Lithography Division Key Figures

*Total sales include intersegment sales (sales to other segments). The gross profit margin and EBIT margin are calculated on total sales.

Order intake in the Lithography division amounted to EUR 49.4 million in the first three months of 2022 following EUR 52.1 million the previous year. The high order entry of the previous year could not quite be matched since customers placed large-volume orders in the coater and developer product lines in the first quarter of 2021. Division sales in the first three months of 2022 amounted to EUR 33.4 million, after EUR 32.3 million in the previous year. This represented growth of nearly 3.4 percent. The division's gross profit margin increased from 10.5 percent to 12.0 percent and is thus above the previous year's level. This is due to very strong demand for high-margin coaters/developers and mask aligners for 300mm applications. Division earnings improved from EUR 2.7 million to EUR 2.9 million.

Bonder

The Bonder division comprises the development, production, and sale of the wafer bonding product line. Manufacturing is located at our largest site in Sternenfels. Markets addressed by the bonder systems include microelectromechanical systems (MEMS), compound semiconductors, and 3D TSV integration.

Bonder Key Figures

in € million	Q1 2022	Q1 2021
Order entry	20.1	9.0
Sales*	12.1	2.1
Gross Profit	3.9	-0.1
Gross Profit Margin*	32.6%	-6.4%
EBIT	0.6	-2.4
EBIT-Margin*	5.0%	-115.1%
Net assets	27.4	16.3

*Total sales include intersegment sales (sales to other segments). The gross profit margin and EBIT margin are calculated on total sales.

In the first quarter of 2022, order entry in the Bonder division amounted to EUR 20.1 million, a considerable increase over the previous year's value of EUR 9.0 million. Segment sales also performed well, reaching EUR 12.1 million in the first three months of 2022 and thus significantly exceeding the previous year's level of EUR 2.1 million. The increase is attributable to the completion of postponed deliveries from 2021 and the commissioning of a developing machine. Sales were generated in equal measure with equipment for permanent and temporary bonding. The gross profit margin amounted to 32.6 percent. EBIT-margin was positive and amounted to 5.0%, after a loss in the previous year's quarter due to a very low sales level.

Photomask Equipment

The Photomask Equipment division, which is located at the Sternenfels site, comprises the development, manufacture, and sale of specialized tools for the cleaning and processing of photomasks for the semiconductor industry. Among the markets targeted by the Photomask Equipment division is the semiconductor industry, where SÜSS MicroTec is active on the front end.

Photomask Equipment Key Figures

in € million	Q1 2022	Q1 2021
Order entry	40.9	12.2
Sales*	7.8	11.4
Gross Profit	2.1	4.4
Gross Profit Margin*	26.4%	39.0%
EBIT	-1.4	2.5
EBIT-Margin*	-17.3%	22.1%
Net assets	15.2	12.0

Photomask Equipment

*Total sales include intersegment sales (sales to other segments). The gross profit margin and EBIT margin are calculated on total sales.

Order entries in the Photomask Equipment division increased at an above-average rate in the first three months of the year. At EUR 40.9 million, their value was more than triple the previous year's value of EUR 12.2 million. Strong demand for automated systems in Asia played a particularly large role in the increase. Division sales were EUR 7.8 million compared to EUR 11.4 million a year earlier. The decline in sales is attributable to the continued poor availability of materials and the resulting postponement of delivery dates. The gross profit margin decreased from 39.0 percent to 26.4 percent due to lower fixed cost coverage. Division earnings fell accordingly from EUR 2.5 million to EUR -1.4 million. Since the systems are custom built and order entry and sales in this division are usually comprised of a few large individual orders, significant fluctuations in order entry, sales, gross profit margin and therefore earnings are possible over the course of the year.

Micro-optics

The Micro-optics division includes the activities of the SÜSS MicroTec subsidiary SÜSS MicroOptics at the Hauterive location in Switzerland. The production and sales of microlenses and highly specialized optics for a variety of industrial applications are housed here.

Micro-optics Key Figures

in € million	Q1 2022	Q1 2021
Order entry	7.1	6.9
Sales*	10.6	7.1
Gross Profit	3.1	1.9
Gross Profit Margin*	29.0%	27.0%
EBIT	0.7	0.3
EBIT-Margin*	6.7%	3.5%
Net assets	22.5	20.6

*Total sales include intersegment sales (sales to other segments). The gross profit margin and EBIT margin are calculated on total sales.

Orders entered in this division slightly exceeded the previous year's level and amounted to EUR 7.1 million in the first quarter of 2022 versus EUR 6.9 million in the previous year. Due to the additional production capacity created last year for applications in the automotive sector, division sales increased significantly, from EUR 7.1 million in the previous year to EUR 10.6 million. Interdivisional sales accounted for EUR 0.5 million of this total in the first quarter of 2022. The gross profit margin also increased slightly, from 27.0 percent in the previous year to 29.0 percent. This improved profitability was driven by increased output and improved efficiency in the first quarter of 2022. Division earnings totaled EUR 0.7 million, after EUR 0.3 million in the previous year.

Others

The Others division represents all other activities as well as costs for central Group functions that generally cannot be attributed to the main divisions. Commission income for the sale of third-party equipment is also reported in this division. SÜSS MicroTec has taken over sales services in China for a former French Group company on the basis of a representative agreement with corresponding commission income: This contract was agreed in the context of the spin-off. Commission income may fluctuate from year to year and is difficult to forecast. The Others division made a negative contribution to EBIT of EUR -0.7 million (previous year: EUR -1.6 million). This improvement over the first quarter of the previous year is mainly attributable to additional reallocations of indirect costs in the form of management, marketing and insurance allocations. Only attributable costs such as IT allocations and rents were reallocated in the first quarter of 2021.

OUTLOOK

Following very strong order entry in the first quarter of 2022, which further increased the order backlog as of March 31, 2022, we are well-positioned to continue our planned growth. However, the COVID-19 pandemic is still causing considerable supply bottlenecks that will not be resolved as quickly as originally expected due to the renewed strict lockdowns in China. These supply bottlenecks have already slowed our sales growth in the first quarter of 2022; they will lead to delayed delivery dates – and, by extension, delayed income recognition – in subsequent quarters as well. The situation has been exacerbated by the uncertainties and strains resulting from the war between Russia and Ukraine. Inflation-driven cost increases, which have a strong impact on energy and transportation costs, have been further aggravated by the war and the imposed economic sanctions. We already pass these cost increases on to our customers. Moreover, we expect our costs and margins to benefit from our transformation program for improved operational excellence, which we launched in 2021.

Despite this challenging environment, we still expect sales of between EUR 270 million and EUR 300 million as well as an EBIT margin between 8.5% and 10.5% in 2022. As in the previous year, sales are expected to be significantly higher in the second half of the year.

Garching, Germany, May 2022

Dr. Götz M. Bendele Oliver Albrecht Dr. Thomas Rohe

Chief Executive Officer Chief Financial Officer Chief Operations Officer

CONSOLIDATED STATEMENT OF INCOME (IFRS)

in € thousand	Q1 2022	Q1 2021
Sales	63,317	52,637
Cost of sales	-42,283	-35,311
Gross profit	21,034	17,326
Selling costs	-6,070	-5,301
Research and development costs	-6,213	-5,106
Administration costs	-5,663	-5,477
Other operating income	1,369	1,367
Other operating expenses	-2,347	-1,364
Analysis of net income from operations (EBIT):
EBITDA (Earnings before Interest and Taxes, Depreciation and Amortization)	4.245	3.285
Depreciation and amortization of tangible assets, intangible assets and investments in subsidiaries	-2.135	-1.840
Net income from operations (EBIT)	2,110	1,445
Financial income	2	1
Financial expense	-133	-110
Financial result	-131	-109
Profit / loss from continuing operations before taxes	1,979	1,336
Income taxes	-559	-561
Profit / loss from continuing operations	1,420	775
Thereof equity holders of SUSS MicroTec	1,420	775
Thereof non-controlling interests	0	0
Earnings per share (basic)
Earnings per share in €	0.07	0.04
Earnings per share (diluted)
Earnings per share in €	0.07	0.04

STATEMENT OF COMPREHENSIVE INCOME (IFRS)

in € thousand	Q1 2022	Q1 2021
Net profit / loss	1,420	775
Items that are not reclassified to profit and loss
Remeasurements on defined benefit pension plans	0	0
Deferred taxes	0	0
Other income after tax for items that are not reclassified as an expense or income	0	0
Items that will be reclassified to profit and loss in later periods
Foreign currency adjustment	519	492
Cash flow hedges	0	0
Deferred taxes	0	0
Other income after tax for items that will be reclassified to profit and loss in later periods	519	492
Total income and expenses recognized in equity	519	492
Total income and expenses reported in the reporting period	1,939	1,267
Thereof equity holders of SUSS MicroTec SE	1,939	1,267
Thereof non-controlling interests	0	0

CONSOLIDATED STATEMENT OF FINANCIAL POSITION (IFRS)

in € thousand	03/31/2022	12/31/2021
Assets
NON-CURRENT ASSETS	72,127	70,316
Intangible assets	5,580	5,557
Goodwill	18,490	18,449
Tangible assets	44,000	44,506
Other assets	379	364
Deferred tax assets	3,677	1,440
CURRENT ASSETS	215,721	208,850
Inventories	114,858	99,549
Trade receivables	17,239	15,605
Contract assets	23,898	31,820
Other financial assets	713	1,356
Current tax assets	44	38
Cash and cash equivalents	52,775	52,075
Other assets	6,195	8,407
TOTAL ASSETS	287,847	279,166

in € thousand	03/31/2022	12/31/2021
Liabilities & shareholders' equity
Equity	158,815	156,876
Total equity attributable to shareholders of SUSS MicroTec SE	158,815	156,876
Subscribed capital	19,116	19,116
Reserves	136,404	134,984
Accumulated other comprehensive income	3,295	2,776
NON-CURRENT LIABILITIES	31,589	29,853
Pension plans and similar commitments	5,430	5,349
Provisions	378	378
Financial debt	7,500	7,813
Financial debt from lease obligations	6,328	7,068
Other liabilities	282	289
Deferred tax liabilities	11,672	8,956
CURRENT LIABILITIES	97,443	92,437
Provisions	5,528	5,426
Tax liabilities	3,353	6,669
Financial debt	1,213	1,212
Financial debt from lease obligations	2,526	2,224
Other financial liabilities	10,984	10,628
Trade payables	19,970	24,444
Contract liabilities	45,413	33,838
Other liabilities	8,457	7,996
TOTAL LIABILITIES AND SHAREHOLDERS' EQUITY	287,847	279,166

CONSOLIDATED STATEMENT OF CASH FLOWS (IFRS)

in $\epsilon$ thousand	Q1 2022	Q1 2021
Net profit / loss (after taxes)	1,420	775
Amortization of intangible assets	218	165
Depreciation of tangible assets	1,917	1,675
Profit or loss on disposal of intangible and tangible assets	0	56
Change of reserves on inventories	1,350	853
Change of reserves for bad debts	1,640	$-612$
Non-cash income from the reversal of pension accruals	0	0
Other non-cash effective income and expenses	214	541
Change in inventories	$-16,459$	$-11,386$
Change in contract assets	7,973	12,750
Change in trade receivables	$-3,245$	4,123
Change in other assets	2,841	$-2,611$
Change in pension provisions	68	$-133$
Change in trade payables	$-4,495$	3,937
Change in contract liabilities	11,524	$-257$
Change in other liabilities and other provisions	906	596
Change of tax assets and tax liabilities	$-2,844$	304
Cash flow from operating activities	3,028	10,776

in $\epsilon$ thousand	Q1 2022	Q1 2021
Disbursements for other tangible assets	$-1,173$	$-1,496$
Disbursements for intangible assets	$-240$	$-149$
Purchases of current available-for-sale securities	0	0
Cash flow from investing activities	$-1,413$	$-1,645$
Repayment of bank loans	$-312$	$-250$
Increase of bank loans	0	0
Repayment of leasing liabilities	$-602$	$-435$
Change in other financial debt	0
Cash flow from financing activities	$-914$	$-684$
Adjustments to funds caused by exchange-rate fluctuations	$-1$	134
Change in cash and cash equivalents	700	8,581
Funds at beginning of the year	52,075	40,827
Funds at end of the period	52,775	49,408
Cash flow from operating activities includes:
Interest paid during the period	71	32
Interest received during period	2	0
Tax paid during the period	233	305
Tax refunds during the period	0	0

STATEMENT OF CHANGES IN EQUITY (IFRS)

in $\epsilon$ thousand	Subscribed capital	Additional paid-in capital	Earnings reserve	Retained earnings	Accumulated other comprehensive income				Total equity attributable to shareholders of SÜSS MicroTec SE
					Items that will not be reclassified to profit or loss		Items that will be reclassified to profit or loss in later periods
					Remeasurements on defined benefit pension plans	Deferred taxes	Foreign currency adjustment	Deferred taxes
As of January 01, 2021	19,116	55,822	202	62,945	3,845	1,004	1,260		136,504
Net income / loss				775					775
Total income and expenses recognized in equity					$\overline{\phantom{a}}$		492		492
Total comprehensive income / loss	$\overline{\phantom{a}}$		$\overline{\phantom{a}}$	775	$\overline{\phantom{0}}$		492		1,267
As of March 31, 2021	19,116	55,822	202	63,720	3,845 $\blacksquare$	1,004	1,752		137,771
As of January 01, 2022	19,116	55,822	202	78,960	2,469 $\blacksquare$	662	4,583		156,876
Net income / loss	$\overline{\phantom{a}}$	$\overline{\phantom{a}}$	$\overline{\phantom{a}}$	1,420	٠	$\overline{\phantom{a}}$	$\overline{\phantom{a}}$		1,420
Total income and expenses recognized in equity					٠		519		519
Total comprehensive income / loss	۰	$\overline{\phantom{a}}$	$\overline{\phantom{a}}$	1,420	٠	$\overline{\phantom{a}}$	519	$\overline{\phantom{a}}$	1,939
As of March 31, 2022	19,116	55,822	202	80,380	2,469 $\overline{\phantom{a}}$	662	5,102		158,815

SEGMENT REPORTING (IFRS)

in $\epsilon$ thousand		Lithography		Substrate Bonder		Photomask Equipment		MicroOptics		Other		Consolidation effects	Total
	3M / 2022	3M / 2021	3M / 2022	3M / 2021	3M / 2022	3M / 2021	3M / 2022	3M / 2021	3M / 2022	3M / 2021	3M / 2022	3M / 2021	3M / 2022	3M / 2021
External Sales	33,271	32,152	12,074	2,073	7,834	11,343	10,072	6,555	66	513			63,317	52,637
Internal Sales	80	140	$\overline{\phantom{a}}$	6	$\overline{2}$	13	515	552			$-597$	$-711$
Total Sales	33,351	32,292	12,074	2,079	7,836	11.356	10,587	7,107	66	513	$-597$	$-711$	63.317	52,637
Result per segment (EBIT)	2,905	2,673	601	$-2,394$	$-1,356$	2,512	709	252	$-749$	$-1,598$			2,110	1,445
Income before taxes	2,882	2,659	597	$-2,399$	$-1,360$	2,507	700	252	$-840$	$-1,683$			1,979	1,336
Significant non-cash items	$-1,432$	$-450$	$-864$	$-301$	$-252$	$-155$	$-457$	438	$-1$				$-3,006$	$-468$
Segment assets	104,320	90,683	36,708	22,769	33,295	21,246	31,826	25,832	22,396	20,463	$-4.483$	$-2.370$	224,062	178,623
thereof goodwill	18,490	18,374	$\overline{\phantom{a}}$		-		$\overline{\phantom{a}}$	$\overline{\phantom{a}}$		$\overline{\phantom{0}}$			18.490	18,374
Unallocated assets													63,785	100,543
Total assets													287,847	279,166
Segment liabilities	$-50,580$	$-36,870$	$-9,343$	$-6,485$	$-18,068$	$-9.237$	$-9,365$	$-5,235$	$-2,593$	$-2,563$	4,483	2.370	$-85,466$	$-58,020$
Unalloc ated liabilities													$-39,083$	$-64,270$
Total liabilities													$-129.032$	$-122,290$
Depreciation and amortization	651	813	87	83	311	58	729	532	357	354			2,135	1,840
thereof scheduled	651	813	87	83	311	58	729	532	357	354			2.135	1.840
thereof impairment loss	$\overline{\phantom{a}}$	$\overline{\phantom{a}}$	$\overline{\phantom{a}}$		$\overline{\phantom{a}}$
Capital expenditure	425	547	77	121	29	89	499	622	383	266			1,413	1,645
Workforce at June 30	603	641	193	100	205	156	154	112	39	32			1.194	1.041

Sales		Capital expenditure		Assets (without Goodwill)
3M / 2022	3M / 2021	3M / 2022	3M / 2021	3M / 2022	3M / 2021
11.515	8.368	1.363	1.337	185.654	146.401
8.320	5.589	13	187	5.651	5.190
43.482	38.680	37	121	15.227	9.019
$\overline{\phantom{0}}$	$\overline{\phantom{0}}$			$-960$	$-361$
63.317	52.637	1.413	1.645	205.572	160.249

LEGAL STRUCTURE

FINANCIAL CALENDAR 2022

Annual Report 2021	March 31
Quarterly Report 2022 (Q1)	May 12
Shareholders' Meeting 2022	May 31
Interim Report 2022	August 4
Quarterly Report 2022 (Q3)	November 10

CONTACT

SÜSS MicroTec SE

Schleißheimer Straße 90 85748 Garching, Germany Phone: +49 89 32007-100 Email: info@suss.com

Investor Relations Phone: +49 89 32007-161 Email: ir@suss.com www.suss.com

Forward-looking statements: Interim reports include forward-looking statements. Forward-looking statements do not present historical facts but include statements about expectations and the views of the management of SÜSS MicroTec SE. These statements are based on current plans, estimates, and forecasts of the Company's management. Investors should not rely on these statements unreservedly. Forward-looking statements are to be understood in the context of the time at which they were made. The Company does not assume any obligation to update the forward-looking statements included in this report given new information or future events. The Company's obligation to comply with its statutory responsibilities regarding information and reporting remains unaffected. Forward-looking statements always involve risks and uncertainties. A large number of factors that are described in this report could cause actual events to deviate substantially from the forward-looking statements included in this report.

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