ENTEGRIS INC — Director's Dealing 2014

May 16, 2014

SEC Form 3 — Initial Statement of Beneficial Ownership

Issuer: ENTEGRIS INC (ENTG)
CIK: 0001101302
Period of Report: 2014-05-07

Reporting Person: Marshall Gregory Bryan (VP, Quality EHS Data Mgmt)

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	18735.838	Direct

Holdings (Derivative)

Security	Exercise Price	Expiration	Underlying	Shares	Ownership
Employee Stock Option (Right to Buy)	$9.88	2020-02-19	Common Stock (11056)		Direct
Employee Stock Option (Right to Buy)	$11.71	2021-02-19	Common Stock (15084)		Direct

Footnotes

F1: These shares include a total of 11,328 restricted stock units granted on February 22, 2011, February 15, 2012, February 12, 2013 and February 11, 2014 with restrictions that lapse as follows: (i) 5,460 shares vest on February 19, 2015, (ii) 3,460 shares vest February 19, 2016, (iii) 1,558 shares vest on February 19, 2017, and (iv) 850 shares vest on February 19, 2018.

F2: These shares include 2,064.838 shares acquired under the Entegris, Inc. Employee Stock Purchase Plan.

F3: This option vests in four equal annual installments. The first installment became exercisable on February 19, 2014 and the next three installments become exercisable on February 19, 2015, February 19, 2016 and February 19, 2017, respectively.

F4: This option vests in four equal annual installments. The first installment becomes exercisable on February 19, 2015 and the next three installments become exercisable on February 19, 2016, February 19, 2017 and February 19, 2018, respectively.