ENTEGRIS INC — Director's Dealing 2013

May 10, 2013

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: ENTEGRIS INC (ENTG)
CIK: 0001101302
Period of Report: 2013-05-08

Reporting Person: CHRISTMAN DANIEL W (Director)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2013-05-08	Common Stock	A	10406	—	Acquired	131586	Direct
2013-05-09	Common Stock	S	5005	$9.5384	Disposed	126581	Direct

Footnotes

F1: These restricted stock units vest in full on the earlier of (1) the first anniversary date of the award, or (2) the date of the Company's 2014 Annual Meeting of Stockholders.

F2: These shares were awarded on May 8, 2013 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2010 Stock Plan which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.

F3: The price reported in column 4 is a weighted average price reported in reliance on a letter from the Office of Chief Counsel, Securities and Exchange Commission's Division of Corporate Finance to the Society of Corporate Secretaries & Corporate Governance Professionals dated June 25, 2008. These shares were sold in multiple transactions at prices ranging from $9.50 to $9.58, inclusive. The reporting person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote.