ENTEGRIS INC — Director's Dealing 2013

Feb 14, 2013

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: ENTEGRIS INC (ENTG)
CIK: 0001101302
Period of Report: 2013-02-12

Reporting Person: Sauer Michael (VP, Controller & CAO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2013-02-12	Common Stock	A	7564	—	Acquired	29888.733	Direct

Footnotes

F1: These shares are restricted stock units with restrictions that lapse over a four year period with respect to 25% of these shares per year, starting on February 19, 2014.

F2: This restricted stock unit award was made pursuant to an equity incentive award plan in consideration of services as an employee.

F3: Includes 584.384 shares acquired under the Entegris, Inc. Employee Stock Purchase Plan on June 29, 2012 and 1,260.349 shares acquired under the Entegris, Inc. Employee Stock Purchase Plan on December 31, 2012.