AXCELIS TECHNOLOGIES INC — Director's Dealing 2023

Oct 16, 2023

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2023-10-16

Reporting Person: COOGAN JAMES GORDON (EVP and CFO)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2023-10-16	Common Stock	A	5891	$0.00	Acquired	5891	Direct

Footnotes

F1: These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of October 16, 2024, October 16, 2025, October 16, 2026, and October 16, 2027.

F2: All of the shares held after this grant were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.