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AXCELIS TECHNOLOGIES INC Director's Dealing 2022

Feb 23, 2022

31374_dirs_2022-02-23_47a6c255-9fe7-4019-b037-8fe7215970ac.zip

Director's Dealing

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SEC Form 3 — Initial Statement of Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2022-02-23

Reporting Person: Quirk Jeanne (Director)

Holdings (Non-Derivative)

Security	Shares	Ownership
Common Stock	0	Direct

Footnotes

F1: Ms. Quirk did not own any reportable securities, directly or indirectly, prior to becoming a reporting person. A Power of Attorney is filed as Exhibit 24.1 to this Form 3.