AXCELIS TECHNOLOGIES INC — Director's Dealing 2020

May 26, 2020

SEC Form 4 — Statement of Changes in Beneficial Ownership

Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
CIK: 0001113232
Period of Report: 2020-05-26

Reporting Person: Low Russell (EVP, Engineering)

Non-Derivative Transactions

Date	Security	Code	Shares	Price	A/D	Holdings After	Ownership
2020-05-26	Common Stock	M	16423	$14.00	Acquired	94061	Direct
2020-05-26	Common Stock	S	16423	$26.69	Disposed	77638	Direct
2020-05-26	Common Stock	S	13398	$26.84	Disposed	64240	Direct

Derivative Transactions

Date	Security	Exercise Price	Code	Shares	A/D	Expiration	Underlying	Ownership
2020-05-26	Stock option (right to buy)	$14.00	M	16423	Disposed	2023-11-15	Common Stock (16423)	Direct

Footnotes

F1: Of the shares beneficially owned by the executive on May 26, 2020, 51,014 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

F2: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $26.61 to $26.85, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F3: The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $26.72 to $26.96, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price.

F4: 21,898 stock options were granted on November 15, 2016. The remaining options for 5,475 shares will vest on November 15, 2020.